Inventor · disambiguated record
Dominik Marcel Vaudrevange
Also filed as: VAUDREVANGE DOMINIK · VAUDREVANGE DOMINIK MARCEL
8 granted patents·1 pending application·43 citations·filing 2003–2015
81Inventor score
Top patents by PatentIndex Score
9 records- 0182US7427766B2Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiationKONINKL PHILIPS ELECTRONICS NV·Filed 2004·Granted Sep 23, 2008·31 cites·26 claims
- 0281US7468521B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Dec 23, 2008·6 cites·19 claims
- 0349US8040030B2Method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp and a corresponding apparatusKONINKL PHILIPS ELECTRONICS NV·Filed 2007·Granted Oct 18, 2011·2 cites·17 claims
- 0448US7323701B2Gas discharge lampKONINKL PHILIPS ELECTRONICS NV·Filed 2003·Granted Jan 29, 2008·2 cites·10 claims
- 0546US2010194313A1High voltage electrical connection lineKONINKL PHILIPS ELECTRONICS NV·Filed 2008·Application pending·0 cites
- 0645US8519368B2Method and device for generating EUV radiation or soft X-raysNEFF JAKOB WILLI·Filed 2009·Granted Aug 27, 2013·2 cites·15 claims
- 0740US9581392B2Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this typeUSHIO ELECTRIC INC·Filed 2015·Granted Feb 28, 2017·0 cites·20 claims
- 0840US9202659B2Arrangement and method for cooling a plasma-based radiation sourceUSHIO ELECTRIC INC·Filed 2014·Granted Dec 1, 2015·0 cites·16 claims
- 0935US7688948B2Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrologyKONINKL PHILIPS ELECTRONICS NV·Filed 2005·Granted Mar 30, 2010·0 cites·26 claims
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