Inventor

KELLERMAN PETER L

US53 patents

⚠️ This page may combine multiple inventors who share the name “KELLERMAN PETER L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KELLERMAN PETER L

AXCELIS TECH INC

System for improving energy purity and implant consistency, and for minimizing charge accumulation of an implanted substrate

Integrated power oscillator RF source of plasma immersion ion implantation system

Systems and methods for ion beam focusing

Clamping and de-clamping semiconductor wafers on a J-R electrostatic chuck having a micromachined surface by using force delay in applying a single-phase square wave AC clamping voltage

Pretreatment process for plasma immersion ion implantation

Method of making a MEMS electrostatic chuck

MEMS based multi-polar electrostatic chuck

Gas-cooled clamp for RTP

System and method for performing SIMOX implants using an ion shower

Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltage

High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer

MEMS based contact conductivity electrostatic chuck

Pressure controlled heat source and method for using such for RTP

Segmented resonant antenna for radio frequency inductively coupled plasmas

Ion beam scanning control methods and systems for ion implantation uniformity

Methods and systems for trapping ion beam particles and focusing an ion beam

Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Liquid immersion doping

Apparatus and method for controlling ion beam properties using energy filter

System and method for crystalline sheet growth using a cold block and gas jet

Apparatus and method for controlling thickness of a crystalline sheet grown on a melt

Apparatus for controlling heat flow within a silicon melt

Apparatus and method for crystalline sheet growth

Sheet production apparatus for removing a crystalline sheet from the surface of a melt using gas jets located above and below the crystalline sheet

Apparatus for processing a melt

Apparatus and method for monitoring and controlling thickness of a crystalline layer

VARIAN SEMICONDUCTOR EQUIPMENT

Techniques for independently controlling deflection, deceleration and focus of an ion beam

Floating sheet production apparatus and method

Method and apparatus for producing a dislocation-free crystalline sheet

Technique for shaping a ribbon-shaped ion beam

Architecture for ribbon ion beam ion implanter system

Electromagnet with active field containment

Removal of a sheet from a production apparatus

KELLERMAN PETER L

System and method for controlling deflection of a charged particle beam within a graded electrostatic lens

Method of controlling a thickness of a sheet formed from a melt

Floating sheet production apparatus and method

Removing a sheet from the surface of a melt using gas jets

Removal of a sheet from a production apparatus

Melt purification and delivery system

Removing a sheet from the surface of a melt using elasticity and buoyancy

EATON CORP

Accelerator-decelerator electrostatic lens for variably focusing and mass resolving an ion beam in an ion implanter

Biased and serrated extension tube for ion implanter electron shower

Filament for ion implanter plasma shower

Ion beam profiling method and apparatus

Ion implanter electron shower having enhanced secondary electron emission

LEADING EDGE CRYSTAL TECH INC

Method for controlling heat flow within a silicon melt using a heat diffusion barrier assembly

Method for achieving sustained anisotropic crystal growth on the surface of a silicon melt

RADOVANOV SVETLANA

Method and apparatus for controlling an asymmetric electrostatic lens about a central ray trajectory of an ion beam

ROWLAND CHRISTOPHER A

Floating sheet measurement apparatus and method

MACKINTOSH BRIAN H

Method for achieving sustained anisotropic crystal growth on the surface of a silicon melt