Inventor · disambiguated record

Jan M. Chabala

Also filed as: CHABALA JAN M

1 granted patent·63 citations·filing 2000–2000

50Inventor score

Technology areasH01J

Files withAPPLIED MATERIALS INC1

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1 record

0188US6433348B1Lithography using multiple pass raster-shaped beamAPPLIED MATERIALS INC·Filed 2000·Granted Aug 13, 2002·63 cites·25 claims

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