Inventor

KIM HAI-WON

KR21 patents

⚠️ This page may combine multiple inventors who share the name “KIM HAI-WON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIM HAI-WON

HYNIX SEMICONDUCTOR INC

Method for fabricating contact plug with low contact resistance

Capacitor fabrication method

Method for manufacturing gate in semiconductor device

Method for manufacturing semiconductor device having recess gate

Capacitor with nanotubes and method for fabricating the same

Capacitor with nanotubes and method for fabricating the same

Capacitor in semiconductor device and method of manufacturing the same

EUGENE TECHNOLOGY CO LTD

Method and apparatus for manufacturing three-dimensional-structure memory device

Cyclic deposition method for thin film formation, semiconductor manufacturing method, and semiconductor device

Method for depositing insulating film on recessed portion having high aspect ratio

Method and apparatus for depositing amorphous silicon film

Cyclic deposition method for thin film and manufacturing method for semiconductor, and semiconductor device

KIM HAI WON

Method for depositing cyclic thin film

Substrate supporting unit and substrate processing apparatus manufacturing method of the substrate supporting unit

Production method for semiconductor device

SK HYNIX INC

Vertical semiconductor device and method for fabricating the vertical semiconductor device

Vertical semiconductor device and method for fabricating the vertical semiconductor device

Vertical semiconductor device and method for fabricating the vertical semiconductor device

CHO SUNG KIL

Method and apparatus for manufacturing three-dimensional-structure memory device

Method and apparatus for manufacturing three-dimensional-structure memory device

HYUNDAI ELECTRONICS IND

Method of optimizing process of selective epitaxial growth