Inventor
STOLFI MICHAEL
US5 patents
Patents
5 patentsUS12062708B2Aug 13, 2024
Selective silicon etch for gate all around transistors
APPLIED MATERIALS INC0 citations60
US11508828B2Nov 22, 2022
Selective silicon etch for gate all around transistors
APPLIED MATERIALS INC0 citations60
US12334337B2Jun 17, 2025
Integrated flowable low-k gap-fill and plasma treatment
APPLIED MATERIALS INC0 citations50
US12243941B2Mar 4, 2025
Conformal oxidation for gate all around nanosheet I/O device
APPLIED MATERIALS INC0 citations50
US12363948B2Jul 15, 2025
Formation of gate all around device
APPLIED MATERIALS INC0 citations47