Inventor · disambiguated record
Edward Hage
Also filed as: HAGE EDWARD
5 granted patents·14 citations·filing 2002–2020
69Inventor score
Top patents by PatentIndex Score
5 records- 0170US9977349B2Support device, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted May 22, 2018·2 cites·15 claims
- 0270US6854316B2Device for measuring the static and/or dynamic friction coefficient of an artificial grass lawn for sports fieldsTEN CATE THIOLON BV·Filed 2002·Granted Feb 15, 2005·12 cites·7 claims
- 0340US12449726B2Apparatus for assembly of a reticle assemblyASML NETHERLANDS BV·Filed 2020·Granted Oct 21, 2025·0 cites·20 claims
- 0434US7265817B2Lithographic apparatus, device manufacturing method, and slide assemblyASML NETHERLANDS BV·Filed 2004·Granted Sep 4, 2007·0 cites·22 claims
- 0528US6962073B2Method and device for determining the values of stiffness and dampening of surfacesTEN CATE THIOLON BV·Filed 2002·Granted Nov 8, 2005·0 cites·4 claims
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