Inventor
SRIVATHANAKUL SONGKRAM
US11 patents
Patents
11 patentsUS9330982B1May 3, 2016
Semiconductor device with diffusion barrier film and method of manufacturing the same
GLOBALFOUNDRIES INC11 citations83
US9793169B1Oct 17, 2017
Methods for forming mask layers using a flowable carbon-containing silicon dioxide material
GLOBALFOUNDRIES INC3 citations72
US9245979B2Jan 26, 2016
FinFET semiconductor devices with local isolation features and methods for fabricating the same
GLOBALFOUNDRIES INC6 citations72
US8940650B2Jan 27, 2015
Methods for fabricating integrated circuits utilizing silicon nitride layers
GLOBALFOUNDRIES INC4 citations72
US9905460B2Feb 27, 2018
Methods of self-forming barrier formation in metal interconnection applications
GLOBALFOUNDRIES INC3 citations71
US8716150B1May 6, 2014
Method of forming a low-K dielectric film
GLOBALFOUNDRIES INC3 citations62
US8900940B2Dec 2, 2014
Reducing gate height variance during semiconductor device formation
GLOBALFOUNDRIES INC0 citations51
US9349814B2May 24, 2016
Gate height uniformity in semiconductor devices
GLOBALFOUNDRIES INC0 citations50
US9093560B2Jul 28, 2015
Gate height uniformity in semiconductor devices
GLOBALFOUNDRIES INC1 citations50
US9318440B2Apr 19, 2016
Formation of carbon-rich contact liner material
GLOBALFOUNDRIES INC1 citations49
US9130019B2Sep 8, 2015
Formation of carbon-rich contact liner material
GLOBALFOUNDRIES INC1 citations49