Inventor
HENLEY FRANCOIS J
US147 patents
⚠️ This page may combine multiple inventors who share the name “HENLEY FRANCOIS J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SILICON GENESIS CORP
46 patentsUS7674687B2Mar 9, 2010
Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process
SILICON GENESIS CORP300 citations99
US7371660B2May 13, 2008
Controlled cleaving process
SILICON GENESIS CORP289 citations99
US7351644B2Apr 1, 2008
Thin handle substrate method and structure for fabricating devices using one or more films provided by a layer transfer process
SILICON GENESIS CORP290 citations99
US7166520B1Jan 23, 2007
Thin handle substrate method and structure for fabricating devices using one or more films provided by a layer transfer process
SILICON GENESIS CORP385 citations99
US7160790B2Jan 9, 2007
Controlled cleaving process
SILICON GENESIS CORP70 citations99
US6790747B2Sep 14, 2004
Method and device for controlled cleaving process
SILICON GENESIS CORP239 citations99
US6632724B2Oct 14, 2003
Controlled cleaving process
SILICON GENESIS CORP163 citations99
US6548382B1Apr 15, 2003
Gettering technique for wafers made using a controlled cleaving process
SILICON GENESIS CORP162 citations99
US6528391B1Mar 4, 2003
Controlled cleavage process and device for patterned films
SILICON GENESIS CORP422 citations99
US6511899B1Jan 28, 2003
Controlled cleavage process using pressurized fluid
SILICON GENESIS CORP133 citations99
US6486041B2Nov 26, 2002
Method and device for controlled cleaving process
SILICON GENESIS CORP124 citations99
US6458672B1Oct 1, 2002
Controlled cleavage process and resulting device using beta annealing
SILICON GENESIS CORP84 citations99
US6448152B1Sep 10, 2002
Method and system for generating a plurality of donor wafers and handle wafers prior to an order being placed by a customer
SILICON GENESIS CORP149 citations99
US6391740B1May 21, 2002
Generic layer transfer methodology by controlled cleavage process
SILICON GENESIS CORP163 citations99
US6321134B1Nov 20, 2001
Clustertool system software using plasma immersion ion implantation
SILICON GENESIS CORP357 citations99
US6290804B1Sep 18, 2001
Controlled cleavage process using patterning
SILICON GENESIS CORP121 citations99
US6284631B1Sep 4, 2001
Method and device for controlled cleaving process
SILICON GENESIS CORP86 citations99
US6245161B1Jun 12, 2001
Economical silicon-on-silicon hybrid wafer assembly
SILICON GENESIS CORP127 citations99
US6207005B1Mar 27, 2001
Cluster tool apparatus using plasma immersion ion implantation
SILICON GENESIS CORP209 citations99
US6187110B1Feb 13, 2001
Device for patterned films
SILICON GENESIS CORP123 citations99
US6184111B1Feb 6, 2001
Pre-semiconductor process implant and post-process film separation
SILICON GENESIS CORP251 citations99
US6162705ADec 19, 2000
Controlled cleavage process and resulting device using beta annealing
SILICON GENESIS CORP113 citations99
US6159824ADec 12, 2000
Silicon-on-silicon wafer bonding process using a thin film blister-separation method
SILICON GENESIS CORP188 citations99
US6153524ANov 28, 2000
Cluster tool method using plasma immersion ion implantation
SILICON GENESIS CORP150 citations99
US6146979ANov 14, 2000
Pressurized microbubble thin film separation process using a reusable substrate
SILICON GENESIS CORP292 citations99
US6103599AAug 15, 2000
Planarizing technique for multilayered substrates
SILICON GENESIS CORP206 citations99
US6083324AJul 4, 2000
Gettering technique for silicon-on-insulator wafers
SILICON GENESIS CORP252 citations99
US6048411AApr 11, 2000
Silicon-on-silicon hybrid wafer assembly
SILICON GENESIS CORP266 citations99
US6033974AMar 7, 2000
Method for controlled cleaving process
SILICON GENESIS CORP386 citations99
US6013567AJan 11, 2000
Controlled cleavage process using pressurized fluid
SILICON GENESIS CORP154 citations99
US6013563AJan 11, 2000
Controlled cleaning process
SILICON GENESIS CORP330 citations99
US6010579AJan 4, 2000
Reusable substrate for thin film separation
SILICON GENESIS CORP254 citations99
US5994207ANov 30, 1999
Controlled cleavage process using pressurized fluid
SILICON GENESIS CORP244 citations99
US5985742ANov 16, 1999
Controlled cleavage process and device for patterned films
SILICON GENESIS CORP493 citations99
US7759220B2Jul 20, 2010
Method and structure for fabricating solar cells using a layer transfer process
SILICON GENESIS CORP61 citations98
US7348258B2Mar 25, 2008
Method and device for controlled cleaving process
SILICON GENESIS CORP55 citations98
US7056808B2Jun 6, 2006
Cleaving process to fabricate multilayered substrates using low implantation doses
SILICON GENESIS CORP121 citations98
US6890838B2May 10, 2005
Gettering technique for wafers made using a controlled cleaving process
SILICON GENESIS CORP71 citations98
US6582999B2Jun 24, 2003
Controlled cleavage process using pressurized fluid
SILICON GENESIS CORP109 citations98
US6291313B1Sep 18, 2001
Method and device for controlled cleaving process
SILICON GENESIS CORP137 citations98
US6558802B1May 6, 2003
Silicon-on-silicon hybrid wafer assembly
SILICON GENESIS CORP59 citations97
US6335264B1Jan 1, 2002
Controlled cleavage thin film separation process using a reusable substrate
SILICON GENESIS CORP60 citations97
US6294814B1Sep 25, 2001
Cleaved silicon thin film with rough surface
SILICON GENESIS CORP54 citations97
US6159825ADec 12, 2000
Controlled cleavage thin film separation process using a reusable substrate
SILICON GENESIS CORP74 citations97
US6155909ADec 5, 2000
Controlled cleavage system using pressurized fluid
SILICON GENESIS CORP80 citations97
US6500732B1Dec 31, 2002
Cleaving process to fabricate multilayered substrates using low implantation doses
SILICON GENESIS CORP150 citations96
PHOTON DYNAMICS INC
4 patentsUSRE37847ESep 17, 2002
Method and apparatus for testing LCD panel array prior to shorting bar removal
PHOTON DYNAMICS INC55 citations96
US5801824ASep 1, 1998
Large area defect monitor tool for manufacture of clean surfaces
PHOTON DYNAMICS INC74 citations96
US5790247AAug 4, 1998
Technique for determining defect positions in three dimensions in a transparent structure
PHOTON DYNAMICS INC79 citations96
US5504438AApr 2, 1996
Testing method for imaging defects in a liquid crystal display substrate
PHOTON DYNAMICS INC94 citations96
Showing the top 50 of 147 patents by PatentIndex Score.