Inventor · disambiguated record
Boris Golovanesky
Also filed as: GOLOVANESKY BORIS · GOLOVANEVSKY BORIS
10 granted patents·448 citations·filing 2003–2009
94Inventor score
Files withKLA TENCOR TECH CORP10
Top patents by PatentIndex Score
10 records- 0197US7433040B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Oct 7, 2008·28 cites·18 claims
- 0297US7317531B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2003·Granted Jan 8, 2008·83 cites·30 claims
- 0397US7242477B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Jul 10, 2007·124 cites·20 claims
- 0496US7564557B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Jul 21, 2009·19 cites·7 claims
- 0596US7289213B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Oct 30, 2007·49 cites·15 claims
- 0696US7280212B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Oct 9, 2007·45 cites·12 claims
- 0795US7876440B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2009·Granted Jan 25, 2011·13 cites·18 claims
- 0894US7385699B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Jun 10, 2008·34 cites·33 claims
- 0994US7301634B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Nov 27, 2007·35 cites·33 claims
- 1088US7379183B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted May 27, 2008·18 cites·44 claims
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