Inventor
MIZUTANI TATSUMI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “MIZUTANI TATSUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
25 patentsUS5284544AFeb 8, 1994
Apparatus for and method of surface treatment for microelectronic devices
HITACHI LTD173 citations99
US4289188ASep 15, 1981
Method and apparatus for monitoring etching
HITACHI LTD60 citations95
US6849191B2Feb 1, 2005
Method and apparatus for treating surface of semiconductor
HITACHI LTD24 citations92
US6677244B2Jan 13, 2004
Specimen surface processing method
HITACHI LTD18 citations92
US6660647B1Dec 9, 2003
Method for processing surface of sample
HITACHI LTD28 citations92
US6332425B1Dec 25, 2001
Surface treatment method and system
HITACHI LTD16 citations92
US6231777B1May 15, 2001
Surface treatment method and system
HITACHI LTD34 citations92
US5874013AFeb 23, 1999
Semiconductor integrated circuit arrangement fabrication method
HITACHI LTD18 citations92
US5554257ASep 10, 1996
Method of treating surfaces with atomic or molecular beam
HITACHI LTD33 citations92
US5462635AOct 31, 1995
Surface processing method and an apparatus for carrying out the same
HITACHI LTD24 citations92
US5140272AAug 18, 1992
Method of semiconductor surface measurment and an apparatus for realizing the same
HITACHI LTD34 citations92
US5108778AApr 28, 1992
Surface treatment method
HITACHI LTD33 citations92
US4412119AOct 25, 1983
Method for dry-etching
HITACHI LTD32 citations92
US5314839AMay 24, 1994
Solid state device fabrication method including a surface treatment step with a neutral particle beam with an energy between 10ev and 100ev
HITACHI LTD37 citations90
US4308089ADec 29, 1981
Method for preventing corrosion of Al and Al alloys
HITACHI LTD27 citations80
US4511429AApr 16, 1985
Process for dry etching of aluminum and its alloy
HITACHI LTD20 citations78
US6309980B1Oct 30, 2001
Semiconductor integrated circuit arrangement fabrication method
HITACHI LTD4 citations74
US6074958AJun 13, 2000
Semiconductor integrated circuit arrangement fabrication method
HITACHI LTD9 citations74
US5962347AOct 5, 1999
Semiconductor integrated circuit arrangement fabrication method
HITACHI LTD8 citations74
US5241186AAug 31, 1993
Surface treatment method and apparatus therefor
HITACHI LTD6 citations74
US6767838B1Jul 27, 2004
Method and apparatus for treating surface of semiconductor
HITACHI LTD11 citations73
US4352974AOct 5, 1982
Plasma etcher having isotropic subchamber with gas outlet for producing uniform etching
HITACHI LTD14 citations73
US7259104B2Aug 21, 2007
Sample surface processing method
HITACHI LTD2 citations63
US6492277B1Dec 10, 2002
Specimen surface processing method and apparatus
HITACHI LTD4 citations63
US7049243B2May 23, 2006
Surface processing method of a specimen and surface processing apparatus of the specimen
HITACHI LTD0 citations52