Inventor · disambiguated record
Masayuki Harashima
Also filed as: HARASHIMA MASAYUKI
6 granted patents·3 pending applications·16 citations·filing 2007–2020
74Inventor score
Top patents by PatentIndex Score
9 records- 0176US11390944B2Film-forming device and method for cleaning sameTOKYO ELECTRON LTD·Filed 2017·Granted Jul 19, 2022·3 cites·5 claims
- 0272US8328943B2Film forming apparatus and methodMORISAKI EISUKE·Filed 2007·Granted Dec 11, 2012·5 cites·7 claims
- 0351US10689759B2Film forming apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jun 23, 2020·0 cites·8 claims
- 0451USD766850SWafer holder for manufacturing semiconductorTOKYO ELECTRON LTD·Filed 2014·Granted Sep 20, 2016·8 cites·1 claims
- 0542US12065732B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Aug 20, 2024·0 cites·8 claims
- 0637US2021166964A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 0736US2021108331A1Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0836US2012128892A1Surface processing method and surface processing apparatusTOYODA NORIAKI·Filed 2011·Application pending·0 cites
- 0931US10550491B2Film-forming apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Feb 4, 2020·0 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →