P

Inventor

SON RYOU

JP5 patents
⚠️ This page may combine multiple inventors who share the name “SON RYOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US9412565B2Aug 9, 2016

Temperature measuring method and plasma processing system

TOKYO ELECTRON LTD1 citations51
US10971341B2Apr 6, 2021

Plasma processing apparatus

TOKYO ELECTRON LTD0 citations49
US10504698B2Dec 10, 2019

Plasma processing apparatus

TOKYO ELECTRON LTD0 citations37

OKADA MITSUHIRO

1 patent
US8080109B2Dec 20, 2011

Film formation apparatus and method for using the same

OKADA MITSUHIRO8 citations82

TOMITA MASAHIKO

1 patent
US8183158B2May 22, 2012

Semiconductor processing apparatus and method for using same

TOMITA MASAHIKO1 citations43