Inventor · disambiguated record
Kie Jin Park
Also filed as: PARK KIE-JIN
8 granted patents·4 pending applications·100 citations·filing 1996–2015
86Inventor score
Top patents by PatentIndex Score
12 records- 0193US8747964B2Ion-induced atomic layer deposition of tantalumPARK KIE JIN·Filed 2011·Granted Jun 10, 2014·33 cites·17 claims
- 0290US9677172B2Methods for forming a cobalt-ruthenium liner layer for interconnect structuresAPPLIED MATERIALS INC·Filed 2015·Granted Jun 13, 2017·8 cites·11 claims
- 0379US9653352B2Methods for forming metal organic tungsten for middle of the line (MOL) applicationsAPPLIED MATERIALS INC·Filed 2014·Granted May 16, 2017·4 cites·20 claims
- 0465US9051655B2Boron ionization for aluminum oxide etch enhancementAPPLIED MATERIALS INC·Filed 2013·Granted Jun 9, 2015·1 cites·11 claims
- 0559US6196495B1Reel for winding photosensitive filmKOLON INC·Filed 1997·Granted Mar 6, 2001·16 cites·13 claims
- 0656US6037100ADry film photoresistKOLON INC·Filed 1998·Granted Mar 14, 2000·21 cites·4 claims
- 0754US5935761APhotosensitive resin compositionKOLON INC·Filed 1996·Granted Aug 10, 1999·17 cites·4 claims
- 0850US8906791B2Method of improving film non-uniformity and throughputPARK KIE-JIN·Filed 2011·Granted Dec 9, 2014·0 cites·19 claims
- 0939US2012228125A1Creation of magnetic field (vector potential) well for improved plasma deposition and resputtering uniformityWU LIQI·Filed 2012·Application pending·0 cites
- 1038US2012070589A1Creation of magnetic field (vector potential) well for improved plasma deposition and resputtering uniformityWU LIQI·Filed 2011·Application pending·0 cites
- 1137US2003079154A1Mothed and apparatus for improving software availability of cluster computer systemFiled 2001·Application pending·0 cites
- 1232US2012083134A1Method of mitigating substrate damage during deposition processesWU HUI-JUNG·Filed 2011·Application pending·0 cites
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