Inventor · disambiguated record
Kazuhiro Isa
Also filed as: ISA KAZUHIRO
2 granted patents·2 pending applications·8 citations·filing 2005–2011
50Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0178US7887637B2Method for cleaning treatment chamber in substrate treating apparatus and method for detecting endpoint of cleaningTOKYO ELECTRON LTD·Filed 2005·Granted Feb 15, 2011·7 cites·25 claims
- 0258US8882962B2Plasma processing apparatusYAMASHITA JUN·Filed 2011·Granted Nov 11, 2014·1 cites·11 claims
- 0343US2010029093A1Plasma oxidizing method, plasma processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 0434US2012094505A1Method for selective oxidation, device for selective oxidation, and computer-readable memory mediumNAKAMURA HIDEO·Filed 2010·Application pending·0 cites
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