Inventor
ZHOU WEN-ZHAN
TW18 patents
⚠️ This page may combine multiple inventors who share the name “ZHOU WEN-ZHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS9766554B2Sep 19, 2017
Method and apparatus for estimating focus and dose of an exposure process
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10558120B2Feb 11, 2020
System and method for supplying and dispensing bubble-free photolithography chemical solutions
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12025917B2Jul 2, 2024
System and method for supplying and dispensing bubble-free photolithography chemical solutions
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12196491B2Jan 14, 2025
Adaptive baking method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11204200B2Dec 21, 2021
Adaptive baking method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10006717B2Jun 26, 2018
Adaptive baking system and method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9817315B2Nov 14, 2017
System and method for supplying and dispensing bubble-free photolithography chemical solutions
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10274839B2Apr 30, 2019
Two-dimensional marks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9690212B2Jun 27, 2017
Hybrid focus-exposure matrix
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
UNITED MICROELECTRONICS CORP
3 patentsUS7527900B2May 5, 2009
Reticle and optical proximity correction method
UNITED MICROELECTRONICS CORP136 citations96
US7238619B2Jul 3, 2007
Method for eliminating bridging defect in via first dual damascene process
UNITED MICROELECTRONICS CORP15 citations84
US7553678B2Jun 30, 2009
Method for detecting semiconductor manufacturing conditions
UNITED MICROELECTRONICS CORP7 citations72