Inventor · disambiguated record

Hirohito Kikushima

Also filed as: KIKUSHIMA HIROHITO

2 granted patents·0 citations·filing 2013–2013

21Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0133US9541920B2Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unitTOKYO ELECTRON LTD·Filed 2013·Granted Jan 10, 2017·0 cites·12 claims
0232US10256128B2Cooling mechanism and processing systemTOKYO ELECTRON LTD·Filed 2013·Granted Apr 9, 2019·0 cites·12 claims

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