Inventor
KAJIYAMA MASAAKI
JP5 patents
Patents
5 patentsUS5641054AJun 24, 1997
Magnetic levitation conveyor apparatus
EBARA CORP182 citations98
US5852298ADec 22, 1998
Micro-processing apparatus and method therefor
EBARA CORP115 citations97
US5398481AMar 21, 1995
Vacuum processing system
EBARA CORP30 citations91
US5904301AMay 18, 1999
Spraying device
EBARA CORP18 citations82
US5515618AMay 14, 1996
Substrate transportation system
EBARA CORP4 citations61