Spraying device

Abstract

A spraying device for conveniently spraying a plurality of cleaning liquids, e.g., a chemical solution and pure water, over a workpiece, includes sprayer body defining therein a plurality of fluid passages. The fluid passages are separate from each other, and each of the fluid passages is communicated to a respective nozzle portion having a nozzle outlet at a nozzle surface defined on an outer surface of the sprayer body. The nozzle portions communicating each of the different fluid passages have substantially the same distribution in the nozzle surface.

What is claimed is: 
     
       1. A cleaning apparatus for cleaning a semiconductor wafer, said apparatus comprising a holder for supporting a semiconductor wafer to be cleaned, a cleaning element to be rubbed against a surface of the semiconductor wafer, and a spraying device for spraying cleaning fluids onto the semiconductor wafer, said spraying device comprising: a plurality of rectangular plates joined together to form a body, said plurality of rectangular plates defining therebetween a fluid passage system within said body, said body having at an end thereof a nozzle surface, and said fluid passage system including plural fluid supply lines;   each said fluid supply line including a main fluid passage extending in said body in a first direction, and a plurality of branch fluid passages branching from said main fluid passage, said plurality of branch fluid passages being equidistantly spaced along said main fluid passage in said first direction, and each said branch fluid passage extending in a second direction substantially perpendicular to said first direction and including a nozzle portion opening at said nozzle surface; and   said nozzle portions of said branch fluid passages of different of said fluid supply lines opening at said nozzle surface in an alternating arrangement in said first direction.   
     
     
       2. An apparatus as claimed in claim 1, wherein said main fluid passage and said branch fluid passages of each said fluid supply line are formed by grooves in a respective said rectangular plate. 
     
     
       3. An apparatus as claimed in claim 2, further comprising a partition plate member covering said grooves. 
     
     
       4. An apparatus as claimed in claim 3, wherein said nozzle portions of a first said fluid supply line comprise holes formed through a first said rectangular plate, and said nozzle portions of a second said fluid supply line comprise holes formed through said first rectangular plate and through said partition plate. 
     
     
       5. An apparatus as claimed in claim 2, wherein said branch fluid passages of different of said fluid supply lines are arranged alternately in said first direction. 
     
     
       6. An apparatus as claimed in claim 1, wherein said branch fluid passages of different of said fluid supply lines are arranged alternately in said first direction. 
     
     
       7. An apparatus as claimed in claim 1, wherein each said nozzle portion comprises an orifice in said nozzle surface. 
     
     
       8. An apparatus as claimed in claim 1, wherein said nozzle surface comprises a planar surface of said body. 
     
     
       9. An apparatus as claimed in claim 1, wherein said nozzle surface is inclined relative to said second direction. 
     
     
       10. An apparatus as claimed in claim 1, wherein said rectangular plates are joined by bonding. 
     
     
       11. An apparatus as claimed in claim 1, further comprising a cleaning fluid supply device for selectively supplying different cleaning fluids to respective of said main fluid passages. 
     
     
       12. An apparatus as claimed in claim 11, wherein said cleaning fluid supply device includes a switching device for sequentially switching supply of the different cleaning fluids to said main fluid passages. 
     
     
       13. An apparatus as claimed in claim 11, wherein said cleaning fluid supply device is operable to supply the different cleaning fluids simultaneously to said respective main fluid passages.