Inventor
SATA NOBUYUKI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “SATA NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS6291800B1Sep 18, 2001
Heat treatment apparatus and substrate processing system
TOKYO ELECTRON LTD86 citations97
US6222161B1Apr 24, 2001
Heat treatment apparatus
TOKYO ELECTRON LTD84 citations97
US6191394B1Feb 20, 2001
Heat treating apparatus
TOKYO ELECTRON LTD85 citations97
US6229116B1May 8, 2001
Heat treatment apparatus
TOKYO ELECTRON LTD57 citations96
US6450803B2Sep 17, 2002
Heat treatment apparatus
TOKYO ELECTRON LTD26 citations92
US6380518B2Apr 30, 2002
Heat treatment apparatus and substrate processing system
TOKYO ELECTRON LTD36 citations92
US7049553B2May 23, 2006
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD12 citations83
US8014895B2Sep 6, 2011
Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon
TOKYO ELECTRON LTD6 citations73
USRE40052EFeb 12, 2008
Heat treatment apparatus
TOKYO ELECTRON LTD8 citations73
US7977609B2Jul 12, 2011
Temperature measuring device using oscillating frequency signals
TOKYO ELECTRON LTD4 citations62
US7241633B2Jul 10, 2007
Heat treatment apparatus and heat treatment method
TOKYO ELECTRON LTD5 citations62
US7316515B2Jan 8, 2008
Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquid
TOKYO ELECTRON LTD1 citations51
MABUCHI MOTOR CO
4 patentsUS5517067AMay 14, 1996
Miniature D.C. motor provided with rotation detector
MABUCHI MOTOR CO26 citations92
US5079468AJan 7, 1992
Miniature motor with revolution-detecting generator
MABUCHI MOTOR CO21 citations82
US5013946AMay 7, 1991
Miniature motor with a frequency generator
MABUCHI MOTOR CO11 citations73
US5070269ADec 3, 1991
Miniature motor having a frequency generator
MABUCHI MOTOR CO10 citations71