Inventor

PARK SOON-YEON

KR6 patents

⚠️ This page may combine multiple inventors who share the name “PARK SOON-YEON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

5 patents

US6677217B2Jan 13, 2004

Methods for manufacturing integrated circuit metal-insulator-metal capacitors including hemispherical grain lumps

SAMSUNG ELECTRONICS CO LTD24 citations92

US6680251B2Jan 20, 2004

Methods of chemical vapor depositing ruthenium by varying chemical vapor deposition parameters

SAMSUNG ELECTRONICS CO LTD16 citations84

US6692795B2Feb 17, 2004

Method for fabricating semiconductor device having ruthenium layer and equipment for fabricating the same

SAMSUNG ELECTRONICS CO LTD5 citations62

US6472319B2Oct 29, 2002

Method for manufacturing capacitor of semiconductor memory device by two-step thermal treatment

SAMSUNG ELECTRONICS CO LTD6 citations62

US6649502B2Nov 18, 2003

Methods of forming multilayer dielectric regions using varied deposition parameters

SAMSUNG ELECTRONICS CO LTD1 citations50

SAMSUNG ELECTRONICS CO INC

1 patent

US7429406B2Sep 30, 2008

Method of forming thin ruthenium-containing layer

SAMSUNG ELECTRONICS CO INC2 citations62