Inventor
BERRY IVAN
US20 patents
⚠️ This page may combine multiple inventors who share the name “BERRY IVAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
13 patentsUS6281135B1Aug 28, 2001
Oxygen free plasma stripping process
AXCELIS TECH INC309 citations96
US6638875B2Oct 28, 2003
Oxygen free plasma stripping process
AXCELIS TECH INC69 citations94
US6734120B1May 11, 2004
Method of photoresist ash residue removal
AXCELIS TECH INC34 citations90
US6664737B1Dec 16, 2003
Dielectric barrier discharge apparatus and process for treating a substrate
AXCELIS TECH INC51 citations90
US6406836B1Jun 18, 2002
Method of stripping photoresist using re-coating material
AXCELIS TECH INC21 citations88
US6503366B2Jan 7, 2003
Chemical plasma cathode
AXCELIS TECH INC13 citations82
US7678682B2Mar 16, 2010
Ultraviolet assisted pore sealing of porous low k dielectric films
AXCELIS TECH INC7 citations73
US6673197B2Jan 6, 2004
Chemical plasma cathode
AXCELIS TECH INC6 citations72
US6605484B2Aug 12, 2003
Process for optically erasing charge buildup during fabrication of an integrated circuit
AXCELIS TECH INC9 citations70
US6897615B2May 24, 2005
Plasma process and apparatus
AXCELIS TECH INC4 citations62
US7704872B2Apr 27, 2010
Ultraviolet assisted pore sealing of porous low k dielectric films
AXCELIS TECH INC1 citations52
US6803319B2Oct 12, 2004
Process for optically erasing charge buildup during fabrication of an integrated circuit
AXCELIS TECH INC0 citations49
US7728293B2Jun 1, 2010
Structures and methods for measuring beam angle in an ion implanter
AXCELIS TECH INC0 citations41
LAM RES CORP
4 patentsUS10153282B1Dec 11, 2018
Ultra-high vacuum transport and storage
LAM RES CORP3 citations69
US9514954B2Dec 6, 2016
Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic films
LAM RES CORP2 citations54
US9543150B2Jan 10, 2017
Systems and methods for forming ultra-shallow junctions
LAM RES CORP1 citations46
US9128382B2Sep 8, 2015
Plasma mediated ashing processes that include formation of a protective layer before and/or during the plasma mediated ashing process
LAM RES CORP0 citations37