Inventor · disambiguated record
Florian Baumer
Also filed as: BAUMER FLORIAN · BÄUMER FLORIAN
8 granted patents·3 pending applications·5 citations·filing 2016–2025
75Inventor score
Top patents by PatentIndex Score
11 records- 0177US11048173B2Method for restoring an illumination system for an EUV apparatus, and detector moduleZEISS CARL SMT GMBH·Filed 2020·Granted Jun 29, 2021·1 cites·20 claims
- 0275US11279191B2Ball jointZAHNRADFABRIK FRIEDRICHSHAFEN·Filed 2018·Granted Mar 22, 2022·2 cites·14 claims
- 0368US11192417B2Arrangement for connecting a chassis link to a wheel carrierZAHNRADFABRIK FRIEDRICHSHAFEN·Filed 2018·Granted Dec 7, 2021·1 cites·9 claims
- 0467US2025028250A1Arrangement, method and computer program product for calibrating facet mirrorsZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0566US9823119B2System and method for analyzing a light beam guided by a beam guiding optical unitZEISS CARL SMT GMBH·Filed 2016·Granted Nov 21, 2017·1 cites·17 claims
- 0661US11500294B2Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the methodZEISS CARL SMT GMBH·Filed 2021·Granted Nov 15, 2022·0 cites·14 claims
- 0759US2025208521A1Arrangement, method and computer program product for calibrating facet mirrorsZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0852US11920977B2Metrology system and method for measuring an excitation laser beam in an EUV plasma sourceZEISS CARL SMT GMBH·Filed 2021·Granted Mar 5, 2024·0 cites·17 claims
- 0952US11737199B2Device and method for measuring the beam angle of a light beam guided by a beam guiding optical unitZEISS CARL SMT GMBH·Filed 2021·Granted Aug 22, 2023·0 cites·20 claims
- 1046US11498380B2Arrangement of an angle measurement deviceZAHNRADFABRIK FRIEDRICHSHAFEN·Filed 2018·Granted Nov 15, 2022·0 cites·12 claims
- 1135US2023184294A1Sensor component, bearing having such a sensor component, and connection of a first chassis component having such a bearing to a further chassis componentZAHNRADFABRIK FRIEDRICHSHAFEN·Filed 2021·Application pending·0 cites
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