Inventor · disambiguated record
Frederick J. Robinson
Also filed as: ROBINSON FREDERICK J · ROBINSON FREDERICK J L
9 granted patents·882 citations·filing 1978–1995
92Inventor score
Top patents by PatentIndex Score
9 records- 0194US4776744ASystems and methods for wafer handling in semiconductor process equipmentAPPLIED MATERIALS INC·Filed 1985·Granted Oct 11, 1988·410 cites·4 claims
- 0293US5389793AApparatus and methods for ion implantationAPPLIED MATERIALS INC·Filed 1994·Granted Feb 14, 1995·90 cites·20 claims
- 0392US4201579AMethod for removing photoresist by hydrogen plasmaMOTOROLA INC·Filed 1978·Granted May 6, 1980·72 cites·7 claims
- 0490US4733091ASystems and methods for ion implantation of semiconductor wafersAPPLIED MATERIALS INC·Filed 1985·Granted Mar 22, 1988·109 cites·23 claims
- 0586US5442237ASemiconductor device having a low permittivity dielectricMOTOROLA INC·Filed 1994·Granted Aug 15, 1995·75 cites·8 claims
- 0679US5591676AMethod of making a semiconductor device having a low permittivity dielectricMOTOROLA INC·Filed 1995·Granted Jan 7, 1997·51 cites·7 claims
- 0772US4801350AMethod for obtaining submicron features from optical lithography technologyMOTOROLA INC·Filed 1986·Granted Jan 31, 1989·42 cites·3 claims
- 0865US4340456AMethod for detecting the end point of a plasma etching reactionMOTOROLA INC·Filed 1979·Granted Jul 20, 1982·20 cites·6 claims
- 0954US5106471AReactive ion etch process for surface acoustic wave (SAW) device fabricationMOTOROLA INC·Filed 1990·Granted Apr 21, 1992·13 cites·10 claims
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