Inventor
KIYOSE HIROMI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “KIYOSE HIROMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS9953840B2Apr 24, 2018
Substrate processing method and substrate processing system
TOKYO ELECTRON LTD5 citations72
US10950465B2Mar 16, 2021
Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus
TOKYO ELECTRON LTD3 citations71
US10619922B2Apr 14, 2020
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD2 citations71
US10504718B2Dec 10, 2019
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD5 citations71
US10395950B2Aug 27, 2019
Substrate processing apparatus, substrate processing method, and recording medium
TOKYO ELECTRON LTD5 citations71
US10037901B2Jul 31, 2018
Substrate liquid treatment apparatus, method of cleaning substrate liquid treatment apparatus and non-transitory storage medium
TOKYO ELECTRON LTD5 citations71
US9721813B2Aug 1, 2017
Liquid processing apparatus with cleaning jig
TOKYO ELECTRON LTD3 citations70
US11201050B2Dec 14, 2021
Substrate processing method, recording medium and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11508588B2Nov 22, 2022
Substrate treatment device and substrate treatment method
TOKYO ELECTRON LTD0 citations50
US11322371B2May 3, 2022
Substrate processing apparatus, substrate processing method and recording medium
TOKYO ELECTRON LTD0 citations50
US11133176B2Sep 28, 2021
Substrate processing method, recording medium and substrate processing system
TOKYO ELECTRON LTD0 citations49