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Inventor

WHITE CARL L

US15 patents
⚠️ This page may combine multiple inventors who share the name “WHITE CARL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INC

3 patents
USD614153SApr 20, 2010

Reactant source vessel

ASM INC557 citations99
US7595271B2Sep 29, 2009

Polymer coating for vapor deposition tool

ASM INC75 citations97
US7571893B2Aug 11, 2009

Valve with high temperature rating

ASM INC0 citations49

FONDURULIA KYLE

3 patents
US8986456B2Mar 24, 2015

Precursor delivery system

FONDURULIA KYLE555 citations98
US8137462B2Mar 20, 2012

Precursor delivery system

FONDURULIA KYLE577 citations98
US9593416B2Mar 14, 2017

Precursor delivery system

FONDURULIA KYLE14 citations83

MATERIALS RESEARCH CORP

3 patents
US5370739ADec 6, 1994

Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD

MATERIALS RESEARCH CORP188 citations98
US5273588ADec 28, 1993

Semiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing means

MATERIALS RESEARCH CORP228 citations98
US5356476AOct 18, 1994

Semiconductor wafer processing method and apparatus with heat and gas flow control

MATERIALS RESEARCH CORP151 citations97

WHITE CARL L

2 patents
US8216380B2Jul 10, 2012

Gap maintenance for opening to process chamber

WHITE CARL L559 citations95
US9388492B2Jul 12, 2016

Vapor flow control apparatus for atomic layer deposition

WHITE CARL L14 citations83

HELIAE DEV LLC

2 patents
US8365462B2Feb 5, 2013

V-Trough photobioreactor systems

HELIAE DEV LLC15 citations82
US8341877B2Jan 1, 2013

Operation and control of V-trough photobioreactor systems

HELIAE DEV LLC9 citations82

SHERO ERIC

1 patent
US9394608B2Jul 19, 2016

Semiconductor processing reactor and components thereof

SHERO ERIC506 citations98

ASM IP HOLDING BV

1 patent
US11208722B2Dec 28, 2021

Vapor flow control apparatus for atomic layer deposition

ASM IP HOLDING BV2 citations73