Inventor · disambiguated record
Steven Donnell
Also filed as: DONNELL STEVEN
8 granted patents·5 pending applications·22 citations·filing 2010–2025
79Inventor score
Top patents by PatentIndex Score
13 records- 0189US11837492B2Electrostatic chuck having a gas flow feature, and related methodsENTEGRIS INC·Filed 2021·Granted Dec 5, 2023·2 cites·19 claims
- 0287US11309207B2Grounding mechanism for multi-layer for electrostatic chuck, and related methodsENTEGRIS INC·Filed 2020·Granted Apr 19, 2022·2 cites·11 claims
- 0386US9692325B2High conductivity electrostatic chuckSUURONEN DAVID·Filed 2011·Granted Jun 27, 2017·10 cites·25 claims
- 0481US8879233B2Electrostatic chuck with polymer protrusionsCOOKE RICHARD A·Filed 2010·Granted Nov 4, 2014·8 cites·31 claims
- 0570US2024286398A1Methods and apparatus for processing an electrostatic chuckENTEGRIS INC·Filed 2024·Application pending·0 cites
- 0663US2023060192A1Methods and apparatus for processing an electrostatic chuckENTEGRIS INC·Filed 2022·Application pending·0 cites
- 0761US12500109B2Electrostatic chuck that includes upper ceramic layer that includes a dielectric layer, and related methods and structuresENTEGRIS INC·Filed 2022·Granted Dec 16, 2025·0 cites·20 claims
- 0861US12444636B2Electrostatic chuck with a charge dissipation structureENTEGRIS INC·Filed 2023·Granted Oct 14, 2025·0 cites·19 claims
- 0960US11612972B2Electrostatic chuck with embossments that comprise diamond-like carbon and deposited silicon-based material, and related methodsENTEGRIS INC·Filed 2021·Granted Mar 28, 2023·0 cites·20 claims
- 1059US2025191957A1High clamp force electrostatic chuck for non-flat substratesENTEGRIS INC·Filed 2024·Application pending·0 cites
- 1155US2025273500A1Electrostatic chuck with reduced charge injection into dielectric layerENTEGRIS INC·Filed 2025·Application pending·0 cites
- 1243US11742781B2Electrostatic chuck with charge dissipation coatingENTEGRIS INC·Filed 2019·Granted Aug 29, 2023·0 cites·13 claims
- 1337US2013108863A1Coated Graphite Article And Reactive Ion Etch Manufacturing And Refurbishment Of Graphite ArticleCOOKE RICHARD A·Filed 2011·Application pending·0 cites
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