Inventor · disambiguated record
Michiyoshi Yamashita
Also filed as: YAMASHITA MICHIYOSHI
4 granted patents·1 pending application·17 citations·filing 2013–2021
71Inventor score
Files withEBARA CORP5
Top patents by PatentIndex Score
5 records- 0190US10427269B2Polishing apparatus and polishing methodEBARA CORP·Filed 2017·Granted Oct 1, 2019·5 cites·8 claims
- 0288US10403505B2Substrate processing method and substrate processing apparatusEBARA CORP·Filed 2017·Granted Sep 3, 2019·5 cites·11 claims
- 0387US9492910B2Polishing methodEBARA CORP·Filed 2015·Granted Nov 15, 2016·5 cites·5 claims
- 0470US9630289B2Polishing method involving a polishing member polishing at angle tangent to the substrate rotational directionEBARA CORP·Filed 2013·Granted Apr 25, 2017·2 cites·28 claims
- 0548US2023326757A1Substrate processing method and substrate processing apparatusEBARA CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →