Inventor
VASQUEZ MIGUEL BENJAMIN
US8 patents
Patents
8 patentsUS11990360B2May 21, 2024
Electrostatic chuck (ESC) pedestal voltage isolation
LAM RES CORP3 citations71
US12347648B2Jul 1, 2025
Filter box for a substrate processing system
LAM RES CORP0 citations60
USD1094488SSep 23, 2025
Manifold for supplying coolant to components of substrate processing systems
LAM RES CORP0 citations58
US10944374B2Mar 9, 2021
Electrostatic chuck filter box and mounting bracket
LAM RES CORP0 citations53
US10693433B2Jun 23, 2020
Electrostatic chuck filter box and mounting bracket
LAM RES CORP1 citations53
US10774588B2Sep 15, 2020
Cluster tool system with step ladder assembly
LAM RES CORP0 citations49
US10378279B2Aug 13, 2019
Step ladder with component rack system for fabrication facility
LAM RES CORP0 citations49
US12362206B2Jul 15, 2025
Foreline assembly for quad station process module
LAM RES CORP0 citations41