Inventor
TSUKAHARA TOSHIYA
JP4 patents
Patents
4 patentsUSD490450SMay 25, 2004
Exhaust ring for semiconductor equipment
TOKYO ELECTRON LTD31 citations90
US7678225B2Mar 16, 2010
Focus ring for semiconductor treatment and plasma treatment device
TOKYO ELECTRON LTD21 citations89
US11664200B2May 30, 2023
Placing table, positioning method of edge ring and substrate processing apparatus
TOKYO ELECTRON LTD2 citations70
US10847348B2Nov 24, 2020
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations37