USD490450SExpiredUtility

Exhaust ring for semiconductor equipment

82
Assignee: TOKYO ELECTRON LTDPriority: May 20, 2002Filed: Nov 19, 2002Granted: May 25, 2004
Est. expiryMay 20, 2022(expired)· nominal 20-yr term from priority
Inventors:Daisuke HayashiToshiya Tsukahara
82
PatentIndex Score
31
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2
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for exhaust ring for semiconductor equipment, as shown and described.

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