Inventor · disambiguated record
Xinye Liu
Also filed as: LIU XINYE
6 granted patents·2 pending applications·1,468 citations·filing 1997–2012
90Inventor score
Top patents by PatentIndex Score
8 records- 0198US8043972B1Adsorption based material removal processNOVELLUS SYSTEMS INC·Filed 2008·Granted Oct 25, 2011·537 cites·29 claims
- 0298US7416989B1Adsorption based material removal processNOVELLUS SYSTEMS INC·Filed 2006·Granted Aug 26, 2008·378 cites·30 claims
- 0397US7977249B1Methods for removing silicon nitride and other materials during fabrication of contactsNOVELLUS SYSTEMS INC·Filed 2008·Granted Jul 12, 2011·183 cites·20 claims
- 0496US8187486B1Modulating etch selectivity and etch rate of silicon nitride thin filmsLIU XINYE·Filed 2007·Granted May 29, 2012·308 cites·26 claims
- 0593US8617348B1Modulating etch selectivity and etch rate of silicon nitride thin filmsLIU XINYE·Filed 2012·Granted Dec 31, 2013·24 cites·20 claims
- 0673US6037003AChemical vapor deposition of aluminum oxideHARVARD COLLEGE·Filed 1997·Granted Mar 14, 2000·38 cites·13 claims
- 0750US2007042119A1Vaporizer for atomic layer deposition systemMATTHYSSE LARRY·Filed 2006·Application pending·0 cites
- 0841US2005016956A1Methods and apparatus for cycle time improvements for atomic layer depositionFiled 2004·Application pending·0 cites
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