Inventor
WATASE MASAMI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “WATASE MASAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
4 patentsUS5536603AJul 16, 1996
Phase shift mask and method of fabricating the same
TOSHIBA KK18 citations81
US4954218ASep 4, 1990
Method for etching a pattern
TOSHIBA KK20 citations81
US5395645AMar 7, 1995
Method for forming a silicon oxide film on a silicon waffer
TOSHIBA KK9 citations73
US5489336AFeb 6, 1996
Apparatus for forming a silicon oxide film on a silicon wafer
TOSHIBA KK3 citations62