Inventor

VAN KIMMENADE JOHANNES M M

NL6 patents

⚠️ This page may combine multiple inventors who share the name “VAN KIMMENADE JOHANNES M M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PHILIPS CORP

4 patents

US5844666ADec 1, 1998

Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device

PHILIPS CORP52 citations95

US5844664ADec 1, 1998

Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning device

PHILIPS CORP61 citations93

US5150153ASep 22, 1992

Lithographic device with a suspended object table

PHILIPS CORP66 citations90

US5953105ASep 14, 1999

Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device

PHILIPS CORP48 citations89

ASM LITHOGRAPHY BV

1 patent

US4746800AMay 24, 1988

Positioning device comprising a z-manipulator and a θ-manipulator

ASM LITHOGRAPHY BV16 citations69

ASML NETHERLANDS BV

1 patent

USRE40774EJun 23, 2009

Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device

ASML NETHERLANDS BV4 citations61