Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device

Abstract

A positioning device with a drive unit with which an object table is displaceable over a guide which is fastened to a first frame thereof. A stationary part of the drive unit is fastened to a second frame thereof and dynamically isolated from the first frame while a reaction force of the object table arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.

1. A positioning device with an object table and a drive unit by which the object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the positioning device while a stationary part of the drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame, wherein a reaction force exerted by the object table on the drive unit during operation and arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame. 
     
     
       2. A positioning device as claimed in  claim 1 , wherein the object table is coupled to the stationary part of the drive unit exclusively by a Lorentz force of a magnet system and an electric coil system of the drive unit during operation. 
     
     
       3. A positioning device as claimed in  claim 2 , wherein the magnet system and the electric coil system belong to a first linear motor of the drive unit, which drive unit comprises a second linear motor with a stationary part fastened to the second frame and a movable part which is displaceable parallel to the X-direction over a guide of the stationary part, the magnet system of the first linear motor being fastened to the object table and the electric coil system of the first linear motor being fastened to the movable part of the second linear motor. 
     
     
       4. A positioning device as claimed in  claim 3 ,  A positioning device with an object table and a drive unit by which the object table is displaceable over a guide parallel to at least an X- direction, which guide is fastened to a first frame of the positioning device while a stationary part of the drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame, wherein a reaction force exerted by the object table on the drive unit during operation and arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame, wherein the object table is coupled to the stationary part of the drive unit exclusively by a Lorentz force of a magnet system and an electric coil system of the drive unit during operation, wherein the magnet system and the electric coil system belong to a first linear motor of the drive unit, which drive unit comprises a second linear motor with a stationary part fastened to the second frame and a movable part which is displaceable parallel to the X - direction over a guide of the stationary part, the magnet system of the first linear motor being fastened to the object table and the electric coil system of the first linear motor being fastened to the movable part of the second linear motor, and  wherein the drive unit comprises a third linear motor with a stationary part which is fastened to the movable part of the second linear motor, and with a movable part which is displaceable parallel to a Y-direction which is perpendicular to the X-direction over a guide of the stationary part of the third linear motor, the electric coil system of the first linear motor being fastened to the movable part of the third linear motor. 
     
     
       5. A positioning device as claimed in  claim 1 , wherein the positioning device is provided with a force actuator system controlled by an electric control unit and exerting a compensation force on the first frame during operation, which compensation force has a mechanical moment about a reference point of the first frame having a value equal to a value of a mechanical moment of a force of gravity acting on the object table about said reference point and a direction which is opposed to a direction of the mechanical moment of said force of gravity. 
     
     
       6. A positioning device as claimed in  claim 5 , wherein object table is displaceable parallel to a horizontal direction, while the force actuator system exerts the compensation force on the first frame parallel to a vertical direction. 
     
     
       7. A positioning device as claimed in  claim 6 , wherein the object table is displaceable parallel to a horizontal X-direction and parallel to a horizontal Y-direction which is perpendicular to the X-direction, while the force actuator system comprises three force actuators mutually arranged in a triangle and each exerting a compensation force on the first frame parallel to the vertical direction. 
     
     
       8. A positioning device as claimed in  claim 5 , wherein the force actuator system is integrated with a system of dynamic isolators by means of which the first frame is coupled to a base of the positioning device. 
     
     
       9. A positioning device as claimed in  claim 5 , wherein the compensation force comprises exclusively a Lorentz force of a magnet system and an electric coil system of the force actuator system. 
     
     
       10. A lithographic device with a machine frame which, seen parallel to a vertical Z-direction, supports in that order a radiation source, a mask holder, a focusing system with a main axis directed parallel to the Z-direction, and a substrate holder which is displaceable perpendicularly to the Z-direction by means of a positioning device, the positioning device of the substrate holder, including an object table and a drive unit by which the object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the positioning device while a stationary part of the drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame, wherein the first frame of the positioning device of the substrate holder belongs to the machine frame of the lithographic device, while the second frame of the positioning device of the substrate holder belongs to a force frame of the lithographic device which is dynamically isolated from the machine frame; and wherein a reaction force exerted by the object table on the drive unit during operation and arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame. 
     
     
       11. A lithographic device with a machine frame which, seen parallel to a vertical Z-direction, supports in that order a radiation source, a mask holder which is displaceable perpendicularly to the Z-direction by means of a positioning device, a focusing system with a main axis directed parallel to the Z-direction, and a substrate holder which is displaceable perpendicularly to the Z-direction by means of a further positioning device, the positioning device of the mask holder including an object table and a drive unit by which the object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the positioning device while a stationary part of the drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame, wherein the first frame of the positioning device of the mask holder belongs to the machine frame of the lithographic device, while the second frame of the positioning device of the mask holder belongs to a force frame of the lithographic device which is dynamically isolated from the machine frame; and wherein a reaction force exerted by the object table on the drive unit during operation and arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame. 
     
     
       12. A lithographic device as claimed in  claim 10 , wherein the mask holder is displaceable perpendicular to the Z-direction by means of said positioning device as claimed in wherein the first frame of the positioning device of the mask holder belongs to the machine frame of the lithographic device, while the second frame of the positioning device of the mask holder belongs to the force frame of the lithographic device. 
     
     
       13. A lithographic device as claimed in  claim 11 , wherein the positioning devices of the substrate holder and the mask holder have a joint force actuator system which is controlled by an electric control unit and which exerts a compensation force on the machine frame of the lithographic device during operation which has a mechanical moment about a reference point of the machine frame of a value which is equal to a value of a sum of a mechanical moment of a force of gravity acting on the substrate holder about said reference point and a mechanical moment of a force of gravity acting on the mask holder about said reference point, and a direction which is opposed to a direction of said sum of mechanical moments. 
     
     
       14. A lithographic device as claimed in  claim 13 , wherein the machine frame is placed on a base of the lithographic device, on which also the force frame is placed, by means of three dynamic isolators mutually arranged in a triangle, while the joint force actuator system comprises three separate force actuators which are each integrated with a corresponding one of the dynamic isolators. 
     
     
       15. A positioning device as claimed in  claim 2 , wherein the positioning device is provided with a force actuator system controlled by an electric control unit and exerting a compensation force on the first frame during operation, which compensation force has a mechanical moment about a reference point of the first frame having a value equal to a value of a mechanical moment of a force of gravity acting on the object table about said reference point and a direction which is opposed to a direction of the mechanical moment of said force of gravity. 
     
     
       16. A positioning device as claimed in  claim 3 , wherein the positioning device is provided with a force actuator system controlled by an electric control unit and exerting a compensation force on the first frame during operation, which compensation force has a mechanical moment about a reference point of the first frame having a value equal to a value of a mechanical moment of a force of gravity acting on the object table about said reference point and a direction which is opposed to a direction of the mechanical moment of said force of gravity. 
     
     
       17. A positioning device as claimed in  claim 4 , wherein the positioning device is provided with a force actuator system controlled by an electric control unit and exerting a compensation force on the first frame during operation, which compensation force has a mechanical moment about a reference point of the first frame having a value equal to a value of a mechanical moment of a force of gravity acting on the object table about said reference point and a direction which is opposed to a direction of the mechanical moment of said force of gravity. 
     
     
       18. A positioning device as claimed in  claim 6 , wherein the force actuator system is integrated with a system of dynamic isolators by means of which the first frame is coupled to a base of the positioning device. 
     
     
       19. A positioning device as claimed in  claim 7 , wherein the force actuator system is integrated with a system of dynamic isolators by means of which the first frame is coupled to a base of the positioning device. 
     
     
       20. A positioning device as claimed in  claim 6 , wherein the compensation force comprises exclusively a Lorentz force of a magnet system and an electric coil system of the force actuator system. 
     
     
       21. A positioning device as claimed in  claim 7 , wherein the compensation force comprises exclusively a Lorentz force of a magnet system and an electric coil system of the force actuator system. 
     
     
       22. A positioning device as claimed in  claim 8 , wherein the compensation force comprises exclusively a Lorentz force of a magnet system and an electric coil system of the force actuator system. 
     
     
       23. A lithographic device with a machine frame which, seen parallel to a vertical Z- direction, supports in that order a radiation source, a mask holder, a focusing system with a main axis directed parallel to the Z - direction, and a substrate holder which is displaceable perpendicularly to the Z - direction by means of a positioning device, the positioning device of the substrate holder, including a first object table and a first drive unit by which the first object table is displaceable over a guide parallel to at least an X - direction, which guide is fastened to a first frame of the positioning device while a stationary part of the first drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame, wherein the first frame of the positioning device of the substrate holder belongs to the machine frame of the lithographic device, while the second frame of the positioning device of the substrate holder belongs to a force frame of the lithographic device which is dynamically isolated from the machine frame by a plurality of dynamic isolators, each dynamic isolator comprising a force actuator and a pneumatic spring; and wherein a reaction force exerted by the first object table on the first drive unit during operation and arising from a driving force exerted by the first drive unit on the first object table is transmittable exclusively into the second frame, and wherein the mask holder is displaceable perpendicularly to the Z - direction by means of a mask holder positioning device with a second object table and a second drive unit by which the second object table is displaceable over a guide parallel to at least an X - direction, which guide is fastened to a first frame of the mask holder positioning device while a stationary part of the second drive unit is fastened to a second frame of the mask holder positioning device which is dynamically isolated from the first frame thereof, wherein a reaction force exerted by the second object table on the second drive unit during operation and arising from a driving force exerted by the second drive unit on the second object table is transmittable exclusively into the second frame, wherein the first frame of the positioning device of the mask holder belongs to the machine frame of the lithographic device, while the second frame of the positioning device of the mask holder belongs to the force frame of the lithographic device.   
     
     
       24. A positioning device with:
   an object table; and        a drive unit by which the object table is displaceable over a guide parallel to at least an X - direction, which guide is fastened to a first frame of the positioning device while a stationary part of the drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame by a plurality of dynamic isolators, each dynamic isolator comprising a force actuator and a pneumatic spring, wherein a reaction force exerted by the object table on the drive unit during operation and arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.     
     
     
       25. A positioning device according to  claim 24 , wherein the object table is a mask table for holding a mask. 
     
     
       26. A positioning device according to  claim 24 , wherein the object table is a substrate holder for holding a substrate. 
     
     
       27. A positioning device according to  claim 24 , wherein the drive unit comprises a first motor for moving the object table in a first direction and a second motor for moving the object table in a second, perpendicular, direction. 
     
     
       28. A positioning device according to  claim 24 , wherein the drive unit comprises:
   a pair of linear motors constructed and arranged to produce gross movements of the object table in a pair of mutually perpendicular directions; and        an actuator, constructed and arranged to produce fine movements of the object table in a pair of mutually perpendicular directions and in a rotational direction.     
     
     
       29. A positioning device according to  claim 28 , wherein the pair of linear motors are constructed and arranged to produce gross movements of the object table in an X- direction and a Y - direction and the actuator is constructed and arranged to produce fine movements of the object table in the X - direction and the Y - direction and rotational movement about a Z - axis, perpendicular to the X and Y directions.   
     
     
       30. A positioning device according to  claim 24 , wherein the dynamic isolators are controlled by an electronic control unit to exert a compensation force on the first frame during operation, which compensation force has a mechanical moment about a reference point of the first frame having a value equal to a value of a mechanical moment of a force of gravity acting on the object table about said reference point and a direction which is opposed to a direction of the mechanical moment of said force of gravity. 
     
     
       31. A positioning device according to  claim 30 , wherein the electronic control unit controls the dynamic isolators in a feedforward control loop based on position control information from a position control system. 
     
     
       32. A positioning device as recited in  claim 30 , wherein the electronic control unit controls the dynamic isolators in a feedback control loop based on measured position information from an interferometric measuring system. 
     
     
       33. A positioning device as recited in  claim 30 , wherein the electronic control unit controls the dynamic isolators based on a combination of position control information from a position control system of the positioning device and on measured position information from an interferometric measuring system. 
     
     
       34. A positioning device with:
   an object table; and        a drive unit by which the object table is displaceable over a guide parallel to at least an X - direction, which guide is fastened to a first frame of the positioning device while a stationary part of the drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame, wherein a reaction force exerted by the object table on the drive unit during operation and arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame,        wherein the second frame comprises a base portion and a vertical column, and the base portion supports the first frame, and        wherein the vertical column is mounted to the base portion independently of the first frame, and        wherein the object table is a mask table for holding a mask and the stationary part of the drive unit is fastened to the vertical column.     
     
     
       35. A positioning device according to  claim 34 , wherein the drive unit comprises a first motor for moving the object table in a first direction and a second motor for moving the object table in a second, perpendicular, direction. 
     
     
       36. A positioning device according to  claim 34 , wherein the drive unit comprises:
   a pair of linear motors constructed and arranged to produce gross movements of the object table in a pair of mutually perpendicular directions; and        an actuator, constructed and arranged to produce fine movements of the object table in a pair of mutually perpendicular directions and in a rotational direction.     
     
     
       37. A positioning device according to  claim 36 , wherein the pair of linear motors are constructed and arranged to produce gross movements of the object table in an X- direction and a Y - direction and the actuator is constructed and arranged to produce fine movements of the object table in the X - direction and the Y - direction and rotational movement about a Z - axis, perpendicular to the X and Y directions.   
     
     
       38. A positioning device according to  claim 34 , wherein the first frame is dynamically isolated from the second frame by a plurality of dynamic isolators, each dynamic isolator comprising a force actuator and a pneumatic spring cooperating to reduce transmission of vibrations between the machine frame and the reference frame. 
     
     
       39. A positioning device according to  claim 38 , wherein the dynamic isolators are controlled by an electronic control unit to exert a compensation force on the first frame during operation, which compensation force has a mechanical moment about a reference point of the first frame having a value equal to a value of a mechanical moment of a force of gravity acting on the object table about said reference point and a direction which is opposed to a direction of the mechanical moment of said force of gravity. 
     
     
       40. A positioning device according to  claim 39 , wherein the electronic control unit controls the dynamic isolators in a feedforward control loop based on position control information from a position control system. 
     
     
       41. A positioning device as recited in  claim 39 , wherein the electronic control unit controls the dynamic isolators in a feedback control loop based on measured position information from an interferometric measuring system. 
     
     
       42. A positioning device as recited in  claim 39 , wherein the electronic control unit controls the dynamic isolators based on a combination of position control information from a position control system of the positioning device and on measured position information from an interferometric measuring system. 
     
     
       43. A positioning device as recited in  claim 34  further comprising a substrate table constructed and arranged to hold a substrate in a position such that a pattern on the mask may be imaged onto the substrate. 
     
     
       44. A positioning device with:
   a first object table, and a first drive unit by which the first object table is displaceable over a guide parallel to at least an X - direction, which guide is fastened to a first frame of the positioning device while a stationary part of the first drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame by a plurality of dynamic isolators, each dynamic isolator comprising a force actuator and a pneumatic spring, wherein a reaction force exerted by the first object table on the first drive unit during operation and arising from a driving force exerted by the first drive unit on the first object table is transmittable exclusively into the second frame; and a second object table, and a second drive unit by which the second object table is displaceable over a guide parallel to at least an X - direction, which guide is fastened to a first frame of the positioning device while a stationary part of the second drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame and wherein a reaction force exerted by the second object table on the second drive unit during operation and arising from a driving force exerted by the second drive unit on the second object table is transmittable exclusively into the second frame.