Inventor · disambiguated record
Jan Van Eijk
Also filed as: EIJK JAN VAN · VAN EIJK JAN · VAN EIJK JAN HENRICUS
37 granted patents·2 pending applications·827 citations·filing 1986–2018
98Inventor score
Files withASML NETHERLANDS BV12PHILIPS CORP10VAN EIJK JAN4KONINKL PHILIPS ELECTRONICS NV3HOL SVEN ANTOIN JOHAN2
Top patents by PatentIndex Score
39 records- 0197US7948122B2Displacement deviceKONINKL PHILIPS ELECTRONICS NV·Filed 2006·Granted May 24, 2011·67 cites·11 claims
- 0294US5172160AOptical lithographic device having a machine frame with force compensationPHILIPS CORP·Filed 1991·Granted Dec 15, 1992·124 cites·10 claims
- 0393US4778275AMethod of aligning a mask and a substrate relative to each other and arrangement for carrying out the methodPHILIPS CORP·Filed 1986·Granted Oct 18, 1988·145 cites·20 claims
- 0487US8482719B2Positioning system, lithographic apparatus and methodVAN EIJK JAN·Filed 2010·Granted Jul 9, 2013·6 cites·16 claims
- 0587US5243491AElectromagnetic support with current-independent characteristicsPHILIPS CORP·Filed 1991·Granted Sep 7, 1993·53 cites·12 claims
- 0684US5844666APositioning device with a vibration-free object table, and lithographic device provided with such a positioning devicePHILIPS CORP·Filed 1996·Granted Dec 1, 1998·52 cites·22 claims
- 0783US7902494B2System for detecting motion of a bodyKONINKL PHILIPS ELECTRONICS NV·Filed 2006·Granted Mar 8, 2011·10 cites·21 claims
- 0883US5844664APositioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning devicePHILIPS CORP·Filed 1996·Granted Dec 1, 1998·61 cites·20 claims
- 0980US9268211B2Lithographic apparatus, and patterning device for use in a lithographic processASML NETHERLANDS BV·Filed 2013·Granted Feb 23, 2016·2 cites·14 claims
- 1080US9110387B2Lithographic apparatus comprising a substrate table and a surface substrate actuatorBUTLER HANS·Filed 2012·Granted Aug 18, 2015·3 cites·15 claims
- 1178US5953105APositioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning devicePHILIPS CORP·Filed 1996·Granted Sep 14, 1999·48 cites·11 claims
- 1276US5204712ASupport device with a tiltable object table, and optical lithographic device provided with such a support devicePHILIPS CORP·Filed 1991·Granted Apr 20, 1993·68 cites·33 claims
- 1375US5767948ALithographic device with a three-dimensionally positionable mask holderPHILIPS CORP·Filed 1996·Granted Jun 16, 1998·37 cites·18 claims
- 1472US7375479B2Apparatus for processing an object with high position accurancyKONINKL PHILIPS ELECTRONICS NV·Filed 2003·Granted May 20, 2008·11 cites·21 claims
- 1572US6943464B2Lithographic apparatus and motor for use in the apparatusASML NETHERLANDS BV·Filed 2003·Granted Sep 13, 2005·10 cites·20 claims
- 1669US9329501B2Lithographic apparatus, method of deforming a substrate table and device manufacturing methodHUANG YANG-SHAN·Filed 2012·Granted May 3, 2016·2 cites·19 claims
- 1769US6717296B2Lithographic apparatus and motor for use in the apparatusASML NETHERLANDS BV·Filed 2002·Granted Apr 6, 2004·23 cites·21 claims
- 1868US8368868B2Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactlessASML NETHERLANDS BV·Filed 2009·Granted Feb 5, 2013·2 cites·14 claims
- 1967US8896811B2Positioning system and a method for positioning a substage with respect to a frameHOL SVEN ANTOIN JOHAN·Filed 2010·Granted Nov 25, 2014·2 cites·20 claims
- 2066US7248339B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 24, 2007·8 cites·11 claims
- 2164US9019470B2Lithographic apparatus, and patterning device for use in a lithographic processVAN EIJK JAN·Filed 2009·Granted Apr 28, 2015·1 cites·17 claims
- 2260US9192271B2Suction unit and autonomous vacuum cleanerDEKKERS JEROEN·Filed 2008·Granted Nov 24, 2015·3 cites·17 claims
- 2360US8059261B2Masking device, lithographic apparatus, and device manufacturing methodVERWEIJ ANTOINE HENDRIK·Filed 2004·Granted Nov 15, 2011·11 cites·63 claims
- 2459US4746800APositioning device comprising a z-manipulator and a θ-manipulatorASM LITHOGRAPHY BV·Filed 1986·Granted May 24, 1988·16 cites·11 claims
- 2558US7423730B2Lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Sep 9, 2008·4 cites·30 claims
- 2657USRE40774EPositioning device with a vibration-free object table, and lithographic device provided with such a positioning deviceASML NETHERLANDS BV·Filed 2002·Granted Jun 23, 2009·4 cites·44 claims
- 2756US5264982AElectromagnetic support with unilateral control currentsPHILIPS CORP·Filed 1991·Granted Nov 23, 1993·17 cites·4 claims
- 2854US7612867B2Lithographic apparatusASML NETHERLANDS BV·Filed 2008·Granted Nov 3, 2009·0 cites·17 claims
- 2951US8982359B2System for detecting motion, lithographic apparatus and device manufacturing methodVAN EIJK JAN·Filed 2012·Granted Mar 17, 2015·0 cites·17 claims
- 3048US6251444B1Dough product and method for improving bread qualityDSM NV·Filed 1993·Granted Jun 26, 2001·21 cites·5 claims
- 3143US8687171B2Electromagnetic actuator, stage apparatus and lithographic apparatusHOL SVEN ANTOIN JOHAN·Filed 2012·Granted Apr 1, 2014·0 cites·15 claims
- 3242US5301013APositioning device having two manipulators operating in parallel, and optical lithographic device provided with such a positioning devicePHILIPS CORP·Filed 1992·Granted Apr 5, 1994·16 cites·11 claims
- 3341US10095123B2Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control programASML NETHERLANDS BV·Filed 2015·Granted Oct 9, 2018·0 cites·19 claims
- 3440US11121115B2Y-theta table for semiconductor equipmentASM TECH SINGAPORE PTE LTD·Filed 2018·Granted Sep 14, 2021·0 cites·14 claims
- 3540US8441616B2Lithographic apparatus and device manufacturing methodVAN EIJK JAN·Filed 2010·Granted May 14, 2013·0 cites·10 claims
- 3639US2012241268A1Arrangement for the vibration isolation of a pay loadLARO DICK ANTONIUS HENDRIKUS·Filed 2012·Application pending·0 cites
- 3737US2010302518A1Lithographic apparatusASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 3836US10061213B2Sensor, object positioning system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Aug 28, 2018·0 cites·20 claims
- 3935US9897926B2Stage positioning system and lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Feb 20, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →