Inventor
TAKAHASHI TOMOWAKI
JP38 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI TOMOWAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
28 patentsUS6172825B1Jan 9, 2001
Catoptric reduction projection optical system and projection exposure apparatus and method using same
NIKON CORP175 citations99
US5861997AJan 19, 1999
Catadioptric reduction projection optical system and exposure apparatus having the same
NIKON CORP185 citations99
US5808805ASep 15, 1998
Exposure apparatus having catadioptric projection optical system
NIKON CORP98 citations99
US5691802ANov 25, 1997
Catadioptric optical system and exposure apparatus having the same
NIKON CORP178 citations99
US5689377ANov 18, 1997
Catadioptric optical system and exposure apparatus having the same
NIKON CORP274 citations99
US5636066AJun 3, 1997
Optical apparatus
NIKON CORP190 citations99
US5805334ASep 8, 1998
Catadioptric projection systems
NIKON CORP98 citations98
US7030965B2Apr 18, 2006
Catadioptric system and exposure device having this system
NIKON CORP56 citations96
US6707616B1Mar 16, 2004
Projection exposure apparatus, projection exposure method and catadioptric optical system
NIKON CORP53 citations96
US6213610B1Apr 10, 2001
Catoptric reduction projection optical system and exposure apparatus and method using same
NIKON CORP80 citations96
US6157498ADec 5, 2000
Dual-imaging optical system
NIKON CORP78 citations96
US6109756AAug 29, 2000
Catoptric reduction projection optical system
NIKON CORP59 citations96
US5999333ADec 7, 1999
Exposure apparatus having catadioptric projection optical system
NIKON CORP76 citations96
US6097537AAug 1, 2000
Catadioptric optical system
NIKON CORP64 citations95
US6538821B2Mar 25, 2003
Projection optical system
NIKON CORP33 citations93
US6392822B1May 21, 2002
Dual-imaging optical system
NIKON CORP36 citations93
US6302548B2Oct 16, 2001
Catoptric reduction projection optical system and exposure apparatus and method using same
NIKON CORP43 citations93
US5969882AOct 19, 1999
Catadioptric optical system
NIKON CORP46 citations93
US5956182ASep 21, 1999
Projection optical system
NIKON CORP32 citations93
US7283206B2Oct 16, 2007
Projection optical system, exposure apparatus, and device manufacturing method
NIKON CORP20 citations84
US7483122B2Jan 27, 2009
Projection optical system, exposure apparatus, and exposure method
NIKON CORP7 citations74
US7312851B2Dec 25, 2007
Projection optical system, exposure apparatus, and exposure method in which a reflective projection optical system has a non-circular aperture stop
NIKON CORP7 citations74
US6781766B2Aug 24, 2004
Projection optical system
NIKON CORP6 citations74
US7692767B2Apr 6, 2010
Projection optical system and exposure apparatus with the same
NIKON CORP2 citations63
US7436589B2Oct 14, 2008
Reflective-type projection optical system and exposure apparatus equipped with said reflective-type projection optical system
NIKON CORP2 citations63
US7470033B2Dec 30, 2008
Reflection-type projection-optical systems, and exposure apparatus comprising same
NIKON CORP1 citations52
US6867931B2Mar 15, 2005
Dual-imaging optical system
NIKON CORP0 citations52
US7630057B2Dec 8, 2009
Projection optical system, exposure apparatus, and device manufacturing method
NIKON CORP0 citations42
NIPPON KOGAKU KK
10 patentsUSRE39024EMar 21, 2006
Exposure apparatus having catadioptric projection optical system
NIPPON KOGAKU KK101 citations99
USRE38438EFeb 24, 2004
Catadioptric reduction projection optical system and exposure apparatus having the same
NIPPON KOGAKU KK92 citations98
USRE39296ESep 19, 2006
Catadioptric projection systems
NIPPON KOGAKU KK46 citations96
USRE38421EFeb 10, 2004
Exposure apparatus having catadioptric projection optical system
NIPPON KOGAKU KK63 citations96
US4437733AMar 20, 1984
Zoom lens
NIPPON KOGAKU KK24 citations81
US4653872AMar 31, 1987
Athermalized zoom lens system
NIPPON KOGAKU KK13 citations74
US4632519ADec 30, 1986
Zoom lens including a wide angle of view
NIPPON KOGAKU KK17 citations74
US4588265AMay 13, 1986
Telecentric rear converter
NIPPON KOGAKU KK12 citations74
US4770511ASep 13, 1988
Zoom lens capable of accomplishing macro-photography
NIPPON KOGAKU KK12 citations73
US4699475AOct 13, 1987
Zoom lens including a wide angle of view
NIPPON KOGAKU KK5 citations62