Inventor · disambiguated record

Martijn Johannes Verbunt

Also filed as: VERBUNT MARTIJN JOHANNES

1 granted patent·5 citations·filing 2004–2004

26Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0156US7126671B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 24, 2006·5 cites·12 claims

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