Inventor · disambiguated record

Venkat Pallem

Also filed as: PALLEM VENKAT

1 granted patent·1 citations·filing 2013–2013

16Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0160US9064694B2Nitridation of atomic layer deposited high-k dielectrics using trisilylamineTOKYO ELECTRON LTD·Filed 2013·Granted Jun 23, 2015·1 cites·16 claims

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