Inventor
SUETSUGU MASUMI
JP13 patents
Patents
13 patentsUS6828079B2Dec 7, 2004
Chemical amplification type positive resist composition
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US6329119B1Dec 11, 2001
Negative type resist composition
SUMITOMO CHEMICAL CO15 citations90
US5476320ADec 19, 1995
Developer preparing apparatus and developer preparing method
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US7202010B2Apr 10, 2007
Chemical amplification type positive resist composition
SUMITOMO CHEMICAL CO19 citations83
US6284863B1Sep 4, 2001
Polymers having O-substituted vinylphenol unit and resist compositions containing them
SUMITOMO CHEMICAL CO15 citations83
US7972763B2Jul 5, 2011
Chemically amplified positive resist composition
SUMITOMO CHEMICAL CO3 citations62
US6762007B2Jul 13, 2004
Chemical amplification type positive resist composition
SUMITOMO CHEMICAL CO3 citations60
US6696218B2Feb 24, 2004
Chemical amplification type positive resist composition
SUMITOMO CHEMICAL CO3 citations58
US7667050B2Feb 23, 2010
Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
SUMITOMO CHEMICAL CO1 citations51
USRE40964ENov 10, 2009
Negative type resist composition
SUMITOMO CHEMICAL CO0 citations49
US7144674B2Dec 5, 2006
Positive resist composition
SUMITOMO CHEMICAL CO1 citations49
US7794913B2Sep 14, 2010
Chemically amplified positive resist composition
SUMITOMO CHEMICAL CO0 citations41
US6689531B2Feb 10, 2004
Resist composition
SUMITOMO CHEMICAL CO0 citations39