P

Inventor

LIU AI-SEN

TW29 patents
⚠️ This page may combine multiple inventors who share the name “LIU AI-SEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

14 patents
US7176137B2Feb 13, 2007

Method for multiple spacer width control

TAIWAN SEMICONDUCTOR MFG101 citations98
US6972253B2Dec 6, 2005

Method for forming dielectric barrier layer in damascene structure

TAIWAN SEMICONDUCTOR MFG19 citations92
US6943077B2Sep 13, 2005

Selective spacer layer deposition method for forming spacers with different widths

TAIWAN SEMICONDUCTOR MFG24 citations92
US6895360B2May 17, 2005

Method to measure oxide thickness by FTIR to improve an in-line CMP endpoint determination

TAIWAN SEMICONDUCTOR MFG19 citations84
US6746900B1Jun 8, 2004

Method for forming a semiconductor device having high-K gate dielectric material

TAIWAN SEMICONDUCTOR MFG17 citations84
US6955984B2Oct 18, 2005

Surface treatment of metal interconnect lines

TAIWAN SEMICONDUCTOR MFG12 citations81
US7271103B2Sep 18, 2007

Surface treated low-k dielectric as diffusion barrier for copper metallization

TAIWAN SEMICONDUCTOR MFG8 citations74
US7083495B2Aug 1, 2006

Advanced process control approach for Cu interconnect wiring sheet resistance control

TAIWAN SEMICONDUCTOR MFG9 citations74
US8053894B2Nov 8, 2011

Surface treatment of metal interconnect lines

TAIWAN SEMICONDUCTOR MFG3 citations62
US7338909B2Mar 4, 2008

Micro-etching method to replicate alignment marks for semiconductor wafer photolithography

TAIWAN SEMICONDUCTOR MFG5 citations58
US6948238B2Sep 27, 2005

Method for dissociating metals from metal compounds

TAIWAN SEMICONDUCTOR MFG0 citations52
US6884149B2Apr 26, 2005

Method and system for in-situ monitoring of mixing ratio of high selectivity slurry

TAIWAN SEMICONDUCTOR MFG0 citations50
US6729935B2May 4, 2004

Method and system for in-situ monitoring of mixing ratio of high selectivity slurry

TAIWAN SEMICONDUCTOR MFG0 citations50
US7011929B2Mar 14, 2006

Method for forming multiple spacer widths

TAIWAN SEMICONDUCTOR MFG0 citations42

INGENTEC CORP

8 patents

EPISTAR CORP

3 patents

UNITED MICROELECTRONICS CORP

2 patents

LEXTAR ELECTRONICS CORP

1 patent

AU OPTRONICS CORP

1 patent