US11769861B2ActiveUtilityA1

Light-emitting diode packaging structure and method for fabricating the same

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Assignee: INGENTEC CORPPriority: Feb 23, 2021Filed: Apr 26, 2021Granted: Sep 26, 2023
Est. expiryFeb 23, 2041(~14.6 yrs left)· nominal 20-yr term from priority
H10W 90/00H10H 20/857H10H 20/01H10H 20/8506H10H 20/0364H10H 20/036H10H 20/85H10H 20/8312H01L 33/382H01L 33/005H01L 33/62
47
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Claims

Abstract

A light-emitting diode packaging structure and a method for fabricating the same is disclosed. A semiconductor wafer is provided, which includes semiconductor substrates. Each semiconductor substrate is penetrated with a first through hole and three second through holes. An insulation layer is formed on the surface of each semiconductor substrate and the inner surfaces of the first through hole, the first sub-through hole, and the second sub-through hole. A patterned electrode layer is formed on the top surface of the semiconductor substrate. A conductive material covering the insulation layer is formed in the first through hole and the second through hole and electrically connected to the patterned electrode layer. Three light-emitting diodes are respectively formed in the first sub-through holes of the second through holes of each semiconductor substrate and respectively electrically connected to the conductive material within the second through holes.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A light-emitting diode packaging structure comprising:
 a semiconductor substrate penetrated with a first through hole and three second through holes, wherein each of the second through holes comprises a first sub-through hole and a second sub-through hole communicating with the first sub-through hole, the first sub-through hole and the second sub-through hole are respectively formed close to a top surface and a bottom surface of the semiconductor substrate, and a cross-sectional area of the first sub-through hole is larger than a cross-sectional area of the second sub-through hole; 
 an insulation layer formed on a surface of the semiconductor substrate and inner surfaces of the first through hole, the first sub-through hole, and the second sub-through hole, and the first through hole and the second sub-through hole are filled with a conductive material that covers the insulation layer; 
 a first patterned electrode layer formed on the top surface of the semiconductor substrate and electrically connected to the conductive material; 
 a second patterned electrode layer formed on the bottom surface of the semiconductor substrate and electrically connected to the conductive material within the first through hole and the second sub-through holes; and 
 three light-emitting diodes respectively formed in the first sub-through holes of the second through holes and respectively electrically connected to the conductive material within the second sub-through holes; 
 wherein each of the light-emitting diodes comprises: 
 a metal combined substrate comprising a first metal layer and two second metal layers, the second metal layers are respectively formed on a top surface and a bottom surface of the first metal layer, the first metal layer comprises a nickel-iron alloy, the second metal layers comprise copper, a ratio of the second metal layer to the first metal layer to the second metal layer of the metal combined substrate in thickness is 1:2.5˜3.5:1, and the metal combined substrate is formed in the first sub-through hole; 
 an epitaxial electrode layer formed on the metal combined substrate and formed in the first sub-through hole; 
 an electrode unit formed on the epitaxial electrode layer and formed in the first sub-through hole; and 
 a transparent conductive layer, covering the metal combined substrate, the conductive material, the epitaxial electrode layer, the electrode unit, and the first patterned electrode layer, electrically connected to the conductive material, the electrode unit, and the first patterned electrode layer. 
 
     
     
       2. The light-emitting diode packaging structure according to  claim 1 , further comprising a plurality of conductive pads formed on the second patterned electrode layer and electrically connected to the second patterned electrode layer. 
     
     
       3. The light-emitting diode packaging structure according to  claim 1 , wherein the light-emitting diodes comprise a red light-emitting diode, a green light-emitting diode, and a blue light-emitting diode. 
     
     
       4. The light-emitting diode packaging structure according to  claim 1 , wherein the conductive material comprises a silver glue. 
     
     
       5. The light-emitting diode packaging structure according to  claim 1 , wherein the first patterned electrode layer and the second patterned electrode layer comprise conductive ink. 
     
     
       6. A method for fabricating a light-emitting diode packaging structure comprising:
 providing a semiconductor wafer, wherein the semiconductor wafer comprises a plurality of semiconductor substrates; 
 penetrating through each of the plurality of semiconductor substrates to form a first through hole and three second through holes, wherein each of the second through holes comprises a first sub-through hole and a second sub-through hole communicating with the first sub-through hole, the first sub-through hole and the second sub-through hole are respectively formed close to a top surface and a bottom surface of the semiconductor substrate, and a cross-sectional area of the first sub-through hole is larger than a cross-sectional area of the second sub-through hole; 
 forming an insulation layer on a surface of each of the plurality of semiconductor substrates and inner surfaces of the first through hole, the first sub-through hole, and the second sub-through hole; 
 forming a first patterned electrode layer on the top surface of the semiconductor substrate; 
 forming a conductive material that covers the insulation layer in the first through hole and the second sub-through hole and electrically connecting the conductive material to the first patterned electrode layer; 
 forming a second patterned electrode layer on the bottom surface of the semiconductor substrate and electrically connecting the second patterned electrode layer to the conductive material within the first through hole and the second sub-through holes; 
 respectively forming three light-emitting diodes in the first sub-through holes of the second through holes of each of the plurality of semiconductor substrates and respectively electrically connecting the light-emitting diodes to the conductive material within the second sub-through holes; and 
 separating from the plurality of semiconductor substrates; 
 each of the light-emitting diodes comprises: 
 a metal combined substrate comprising a first metal layer and two second metal layers, the second metal layers are respectively formed on a top surface and a bottom surface of the first metal layer, the first metal layer comprises a nickel-iron alloy, the second metal layers comprise copper, a ratio of the second metal layer to the first metal layer to the second metal layer of the metal combined substrate in thickness is 1:2.5˜3.5:1, and the metal combined substrate is formed in the first sub-through hole; 
 an epitaxial electrode layer formed on the metal combined substrate and formed in the first sub-through hole; 
 an electrode unit formed on the epitaxial electrode layer and formed in the first sub-through hole; and 
 a transparent conductive layer, covering the metal combined substrate, the conductive material, the epitaxial electrode layer, the electrode unit, and the first patterned electrode layer, electrically connected to the conductive material, the electrode unit, and the first patterned electrode layer. 
 
     
     
       7. The method for fabricating a light-emitting diode packaging structure according to  claim 6 , further comprising a step of forming a plurality of conductive pads on the second patterned electrode layer and electrically connecting the plurality of conductive pads to the second patterned electrode layer. 
     
     
       8. The method for fabricating a light-emitting diode packaging structure according to  claim 6 , wherein the light-emitting diodes comprise a red light-emitting diode, a green light-emitting diode, and a blue light-emitting diode.

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