Inventor
CHENG YU-SHAO
TW5 patents
Patents
5 patentsUS12507472B2Dec 23, 2025
Method of making polysilicon structure including protective layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11855086B2Dec 26, 2023
Polysilicon structure including protective layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10957697B2Mar 23, 2021
Polysilicon structure including protective layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10050035B2Aug 14, 2018
Method of making protective layer over polysilicon structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US12482658B2Nov 25, 2025
Conductive features of semiconductor devices and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42