Inventor · disambiguated record
Palani Sakthivel
Also filed as: SAKTHIVEL PALANI
8 granted patents·632 citations·filing 1999–2005
91Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0194US6281135B1Oxygen free plasma stripping processAXCELIS TECH INC·Filed 1999·Granted Aug 28, 2001·309 cites·23 claims
- 0292US6548416B2Plasma ashing processAXCELIS TECHNOLGOIES INC·Filed 2001·Granted Apr 15, 2003·93 cites·4 claims
- 0391US6638875B2Oxygen free plasma stripping processAXCELIS TECH INC·Filed 2001·Granted Oct 28, 2003·69 cites·6 claims
- 0489US6630406B2Plasma ashing processAXCELIS TECHNOLOGIES·Filed 2001·Granted Oct 7, 2003·50 cites·45 claims
- 0586US7709814B2Apparatus and process for treating dielectric materialsAXCELIS TECH INC·Filed 2005·Granted May 4, 2010·12 cites·47 claims
- 0686US6524936B2Process for removal of photoresist after post ion implantationAXCELIS TECH INC·Filed 2000·Granted Feb 25, 2003·37 cites·43 claims
- 0785US6951823B2Plasma ashing processAXCELIS TECH INC·Filed 2003·Granted Oct 4, 2005·35 cites·40 claims
- 0860US6492186B1Method for detecting an endpoint for an oxygen free plasma processEATON CORP·Filed 1999·Granted Dec 10, 2002·27 cites·32 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →