Inventor
INOUE TOMOSHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “INOUE TOMOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
5 patentsUSD634719SMar 22, 2011
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP539 citations99
US7967665B2Jun 28, 2011
Substrate holding apparatus, polishing apparatus, and polishing method
EBARA CORP5 citations74
US11548113B2Jan 10, 2023
Method and apparatus for polishing a substrate
EBARA CORP2 citations73
US8357029B2Jan 22, 2013
Polishing apparatus
EBARA CORP5 citations73
US10307882B2Jun 4, 2019
Method and apparatus for polishing a substrate
EBARA CORP1 citations62
YASUDA HOZUMI
3 patentsUS8485866B2Jul 16, 2013
Substrate holding apparatus, polishing apparatus, and polishing method
YASUDA HOZUMI8 citations83
US8267746B2Sep 18, 2012
Substrate holding apparatus, polishing apparatus, and polishing method
YASUDA HOZUMI5 citations73
US8100739B2Jan 24, 2012
Substrate holding apparatus, polishing apparatus, and polishing method
YASUDA HOZUMI2 citations62