Inventor · disambiguated record

Toshihara Eurakawa

Also filed as: EURAKAWA TOSHIHARA

1 granted patent·3 citations·filing 2005–2005

21Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0165US7501352B2Method and system for forming an oxynitride layerTOKYO ELECTRON LTD·Filed 2005·Granted Mar 10, 2009·3 cites·163 claims

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