Inventor

ZAFIROPOULO ARTHUR W

US21 patents

⚠️ This page may combine multiple inventors who share the name “ZAFIROPOULO ARTHUR W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZAFIROPOULO ARTHUR W

ULTRATECH INC

Oxygen radical enhanced atomic-layer deposition using ozone plasma

Methods of laser processing photoresist in a gaseous environment

Betavoltaic power sources for mobile device applications

Betavoltaic power sources for transportation applications

Method of laser annealing a semiconductor wafer with localized control of ambient oxygen

Radical-enhanced atomic layer deposition using CF4 to enhance oxygen radical generation

GEN SIGNAL CORP

Quad processor

Multiple-processing and contamination-free plasma etching system

System providing multiple processing of substrates

Method providing multiple-processing of substrates

Quad processor

APPLIED MATERIALS INC

System for processing substrates

Vacuum substrate processing system having multiple processing chambers and a central load/unload chamber

Integrated processing system having multiple reactors connected to a central chamber

Integrated processing system having multiple reactors connected to a central chamber

ZAFIROPOULO ARTHUR W

Electrically conductive structure on a semiconductor substrate formed from printing

Laser annealing scanning methods with reduced annealing non-uniformities

DRYTEK INC

Multi-planar electrode plasma etching

Plasma cassette etcher

DRYTEK

Plasma etchant mixture

HAWRYLUK ANDREW M

Systems for and methods of laser-enhanced plasma processing of semiconductor materials