Inventor
TARUTANI MASAYOSHI
JP25 patents
⚠️ This page may combine multiple inventors who share the name “TARUTANI MASAYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
18 patentsUS6470144B1Oct 22, 2002
Vaporizer for chemical vapor deposition apparatus, chemical vapor deposition apparatus, and semiconductor device manufactured thereby
MITSUBISHI ELECTRIC CORP66 citations96
US6312526B1Nov 6, 2001
Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device
MITSUBISHI ELECTRIC CORP45 citations96
US6638880B2Oct 28, 2003
Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device
MITSUBISHI ELECTRIC CORP23 citations92
US6273957B1Aug 14, 2001
Vaporizing device for CVD source materials and CVD apparatus employing the same
MITSUBISHI ELECTRIC CORP28 citations92
US6235649B1May 22, 2001
Method of forming high dielectric constant thin film and method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP16 citations92
US6179920B1Jan 30, 2001
CVD apparatus for forming thin film having high dielectric constant
MITSUBISHI ELECTRIC CORP43 citations92
US6110283AAug 29, 2000
Chemical vapor deposition apparatus
MITSUBISHI ELECTRIC CORP47 citations92
US6512885B1Jan 28, 2003
Liquid raw material vaporizer, semiconductor device and method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP9 citations74
US6117482ASep 12, 2000
Method and apparatus for monitoring CVD liquid source for forming thin film with high dielectric constant
MITSUBISHI ELECTRIC CORP8 citations74
US10957691B2Mar 23, 2021
Semiconductor device, semiconductor device manufacturing method, and power conversion apparatus
MITSUBISHI ELECTRIC CORP0 citations62
US11031357B2Jun 8, 2021
Semiconductor device
MITSUBISHI ELECTRIC CORP0 citations57
US6448191B2Sep 10, 2002
Method of forming high dielectric constant thin film and method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations52
US10600779B2Mar 24, 2020
Semiconductor device, semiconductor device manufacturing method, and power conversion apparatus
MITSUBISHI ELECTRIC CORP0 citations51
US9911705B2Mar 6, 2018
Semiconductor device and semiconductor device manufacturing method
MITSUBISHI ELECTRIC CORP0 citations51
US10461049B2Oct 29, 2019
Semiconductor device and manufacturing method therefor
MITSUBISHI ELECTRIC CORP0 citations49
US12021118B2Jun 25, 2024
Semiconductor device
MITSUBISHI ELECTRIC CORP0 citations48
US9755037B2Sep 5, 2017
Semiconductor device and method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations48
US10756029B2Aug 25, 2020
Semiconductor device
MITSUBISHI ELECTRIC CORP0 citations46