Inventor
HASEGAWA NORIYASU
JP64 patents
⚠️ This page may combine multiple inventors who share the name “HASEGAWA NORIYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
44 patentsUS6721031B2Apr 13, 2004
Exposure apparatus
CANON KK52 citations96
US5898477AApr 27, 1999
Exposure apparatus and method of manufacturing a device using the same
CANON KK63 citations96
US6954255B2Oct 11, 2005
Exposure apparatus
CANON KK30 citations93
US6721032B2Apr 13, 2004
Exposure apparatus and control method therefor, and device manufacturing method
CANON KK24 citations93
US6424405B2Jul 23, 2002
Exposure apparatus and device manufacturing method
CANON KK26 citations93
US6204911B1Mar 20, 2001
Exposure apparatus and device manufacturing method
CANON KK26 citations93
US5914773AJun 22, 1999
Exposure apparatus and method using pulsed light and changing means to control both the light intensity and light emission timing
CANON KK46 citations93
US5883701AMar 16, 1999
Scanning projection exposure method and apparatus
CANON KK37 citations93
US5847974ADec 8, 1998
Measuring method and apparatus for measuring system having measurement error changeable with time
CANON KK24 citations93
US9594301B2Mar 14, 2017
Imprint apparatus and article manufacturing method using same
CANON KK11 citations84
US9201298B2Dec 1, 2015
Imprint method, imprint apparatus, and article manufacturing method
CANON KK6 citations84
US7907251B2Mar 15, 2011
Exposure apparatus and device manufacturing method
CANON KK8 citations84
US7705966B2Apr 27, 2010
Immersion exposure apparatus
CANON KK13 citations84
US7423724B2Sep 9, 2008
Exposure apparatus and device manufacturing method
CANON KK11 citations84
US7330236B2Feb 12, 2008
Exposure apparatus, and device manufacturing method using the same
CANON KK9 citations84
US7050152B2May 23, 2006
Exposure apparatus
CANON KK16 citations84
US7394522B2Jul 1, 2008
Exposure apparatus and device manufacturing method
CANON KK12 citations82
US7123343B2Oct 17, 2006
Exposure apparatus and device manufacturing method
CANON KK6 citations74
US6934003B2Aug 23, 2005
Exposure apparatus and device manufacturing method
CANON KK6 citations74
US5498878AMar 12, 1996
Method and apparatus for detecting positional deviation by using diffraction gratings with a compensation delay determining unit
CANON KK10 citations74
US10095117B2Oct 9, 2018
Imprint apparatus
CANON KK4 citations72
US11249394B2Feb 15, 2022
Imprint methods for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methods
CANON KK2 citations71
US10663858B2May 26, 2020
Imprint apparatus that forms a pattern of an imprint material on a substrate-side pattern region of a substrate using a mold, and related methods
CANON KK2 citations71
US10421283B2Sep 24, 2019
Ejection material receiving unit, ejection material ejecting apparatus, and manufacturing method of flexible member
CANON KK2 citations71
US9851634B2Dec 26, 2017
Imprint apparatus
CANON KK3 citations70
US11187979B2Nov 30, 2021
Imprint apparatus, imprint method, and article manufacturing method
CANON KK1 citations63
US10919195B2Feb 16, 2021
Imprint apparatus and method of manufacturing article
CANON KK0 citations63
US9892949B2Feb 13, 2018
Imprint method, imprint apparatus, and article manufacturing method
CANON KK1 citations63
US7738076B2Jun 15, 2010
Exposure apparatus and device manufacturing method
CANON KK3 citations63
US7221432B2May 22, 2007
Exposure apparatus
CANON KK4 citations63
US5757838AMay 26, 1998
Output control method for excimer laser
CANON KK4 citations63
US12468221B2Nov 11, 2025
Imprint apparatus for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methods
CANON KK0 citations62
US11535039B2Dec 27, 2022
Ejection-material ejection apparatus and imprinting apparatus
CANON KK1 citations62
US11465350B2Oct 11, 2022
Ejection device, imprint apparatus, and detection method
CANON KK0 citations62
US10513125B2Dec 24, 2019
Fluid containing member
CANON KK1 citations61
US11267252B2Mar 8, 2022
Ejection apparatus and imprint apparatus
CANON KK0 citations60
US11097545B2Aug 24, 2021
Liquid ejection device, cleaning apparatus and cleaning method for module substrate
CANON KK1 citations60
US12257842B2Mar 25, 2025
Liquid discharge apparatus, imprint apparatus, and cleaning method
CANON KK0 citations56
US12083791B2Sep 10, 2024
Liquid discharge device and imprint apparatus
CANON KK0 citations56
US11520227B2Dec 6, 2022
Ejection material filling device, pressure regulation device, and ejection material filling method
CANON KK0 citations52
US10300640B2May 28, 2019
Imprint apparatus and method of manufacturing article
CANON KK0 citations52
US9958773B2May 1, 2018
Imprint apparatus and method of manufacturing article
CANON KK1 citations52
US9566741B2Feb 14, 2017
Imprint method, imprint apparatus, and article manufacturing method
CANON KK0 citations52
US9132458B2Sep 15, 2015
Processing machine system and method of positioning processing machines
CANON KK0 citations52
HAMAYA ZENICHI
2 patentsYOSHIDA SETSUO
1 patentASANO TAKUMI
1 patentUMEMURA ATSUSHI
1 patentNGK SPARK PLUG CO
1 patentShowing the top 50 of 64 patents by PatentIndex Score.