Inventor
MAYER STEVEN T
US201 patents
⚠️ This page may combine multiple inventors who share the name “MAYER STEVEN T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
26 patentsUS6527920B1Mar 4, 2003
Copper electroplating apparatus
NOVELLUS SYSTEMS INC251 citations99
USD648289SNov 8, 2011
Electroplating flow shaping plate having offset spiral hole pattern
NOVELLUS SYSTEMS INC51 citations98
US7967969B2Jun 28, 2011
Method of electroplating using a high resistance ionic current source
NOVELLUS SYSTEMS INC50 citations98
US7622024B1Nov 24, 2009
High resistance ionic current source
NOVELLUS SYSTEMS INC83 citations98
US6964792B1Nov 15, 2005
Methods and apparatus for controlling electrolyte flow for uniform plating
NOVELLUS SYSTEMS INC121 citations98
US6890416B1May 10, 2005
Copper electroplating method and apparatus
NOVELLUS SYSTEMS INC92 citations98
US6793796B2Sep 21, 2004
Electroplating process for avoiding defects in metal features of integrated circuit devices
NOVELLUS SYSTEMS INC92 citations98
US6551487B1Apr 22, 2003
Methods and apparatus for controlled-angle wafer immersion
NOVELLUS SYSTEMS INC145 citations98
US6315883B1Nov 13, 2001
Electroplanarization of large and small damascene features using diffusion barriers and electropolishing
NOVELLUS SYSTEMS INC112 citations98
US7449098B1Nov 11, 2008
Method for planar electroplating
NOVELLUS SYSTEMS INC110 citations97
US7070686B2Jul 4, 2006
Dynamically variable field shaping element
NOVELLUS SYSTEMS INC76 citations97
US6800187B1Oct 5, 2004
Clamshell apparatus for electrochemically treating wafers
NOVELLUS SYSTEMS INC168 citations97
US6773571B1Aug 10, 2004
Method and apparatus for uniform electroplating of thin metal seeded wafers using multiple segmented virtual anode sources
NOVELLUS SYSTEMS INC144 citations97
US6755946B1Jun 29, 2004
Clamshell apparatus with dynamic uniformity control
NOVELLUS SYSTEMS INC79 citations97
US6755954B2Jun 29, 2004
Electrochemical treatment of integrated circuit substrates using concentric anodes and variable field shaping elements
NOVELLUS SYSTEMS INC140 citations97
US6586342B1Jul 1, 2003
Edge bevel removal of copper from silicon wafers
NOVELLUS SYSTEMS INC76 citations97
US6551483B1Apr 22, 2003
Method for potential controlled electroplating of fine patterns on semiconductor wafers
NOVELLUS SYSTEMS INC110 citations97
US6309981B1Oct 30, 2001
Edge bevel removal of copper from silicon wafers
NOVELLUS SYSTEMS INC161 citations97
US7605082B1Oct 20, 2009
Capping before barrier-removal IC fabrication method
NOVELLUS SYSTEMS INC36 citations96
US7338908B1Mar 4, 2008
Method for fabrication of semiconductor interconnect structure with reduced capacitance, leakage current, and improved breakdown voltage
NOVELLUS SYSTEMS INC66 citations96
US6919010B1Jul 19, 2005
Uniform electroplating of thin metal seeded wafers using rotationally asymmetric variable anode correction
NOVELLUS SYSTEMS INC66 citations96
US6402923B1Jun 11, 2002
Method and apparatus for uniform electroplating of integrated circuits using a variable field shaping element
NOVELLUS SYSTEMS INC163 citations96
US6333275B1Dec 25, 2001
Etchant mixing system for edge bevel removal of copper from silicon wafers
NOVELLUS SYSTEMS INC438 citations96
US6946065B1Sep 20, 2005
Process for electroplating metal into microscopic recessed features
NOVELLUS SYSTEMS INC60 citations95
US6713122B1Mar 30, 2004
Methods and apparatus for airflow and heat management in electroless plating
NOVELLUS SYSTEMS INC44 citations95
US6562204B1May 13, 2003
Apparatus for potential controlled electroplating of fine patterns on semiconductor wafers
NOVELLUS SYSTEMS INC47 citations95
UNIV CALIFORNIA
12 patentsUS5789338AAug 4, 1998
Process for producing carbon foams for energy storage devices
UNIV CALIFORNIA120 citations99
US5626977AMay 6, 1997
Composite carbon foam electrode
UNIV CALIFORNIA153 citations99
US5529971AJun 25, 1996
Carbon foams for energy storage devices
UNIV CALIFORNIA149 citations99
US5420168AMay 30, 1995
Method of low pressure and/or evaporative drying of aerogel
UNIV CALIFORNIA208 citations99
US5932185AAug 3, 1999
Method for making thin carbon foam electrodes
UNIV CALIFORNIA90 citations98
US5908896AJun 1, 1999
Organic aerogel microspheres
UNIV CALIFORNIA144 citations98
US5636437AJun 10, 1997
Fabricating solid carbon porous electrodes from powders
UNIV CALIFORNIA164 citations98
US5601938AFeb 11, 1997
Carbon aerogel electrodes for direct energy conversion
UNIV CALIFORNIA117 citations98
US5508341AApr 16, 1996
Organic aerogel microspheres and fabrication method therefor
UNIV CALIFORNIA177 citations98
US5898564AApr 27, 1999
Capacitor with a composite carbon foam electrode
UNIV CALIFORNIA41 citations96
US5402306AMar 28, 1995
Aquagel electrode separator for use in batteries and supercapacitors
UNIV CALIFORNIA55 citations96
US5358802AOct 25, 1994
Doping of carbon foams for use in energy storage devices
UNIV CALIFORNIA100 citations96
POLYSTOR CORP
5 patentsUS6379842B1Apr 30, 2002
Mixed lithium manganese oxide and lithium nickel cobalt oxide positive electrodes
POLYSTOR CORP143 citations99
US6007947ADec 28, 1999
Mixed lithium manganese oxide and lithium nickel cobalt oxide positive electrodes
POLYSTOR CORP157 citations99
US5783333AJul 21, 1998
Lithium nickel cobalt oxides for positive electrodes
POLYSTOR CORP235 citations99
US5741606AApr 21, 1998
Overcharge protection battery vent
POLYSTOR CORP140 citations97
US5609972AMar 11, 1997
Cell cap assembly having frangible tab disconnect mechanism
POLYSTOR CORP116 citations95
MAYER STEVEN T
3 patentsUS8795480B2Aug 5, 2014
Control of electrolyte hydrodynamics for efficient mass transfer during electroplating
MAYER STEVEN T48 citations98
US8262871B1Sep 11, 2012
Plating method and apparatus with multiple internally irrigated chambers
MAYER STEVEN T55 citations97
US8158532B2Apr 17, 2012
Topography reduction and control by selective accelerator removal
MAYER STEVEN T44 citations97
ATARI INC
2 patentsUS ENERGY
1 patentKASCHMITTER JAMES L
1 patentShowing the top 50 of 201 patents by PatentIndex Score.