Inventor
KURIMOTO TAKASHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KURIMOTO TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
4 patentsUS5472564ADec 5, 1995
Method of dry etching with hydrogen bromide or bromide
FUJITSU LTD60 citations94
US5316616AMay 31, 1994
Dry etching with hydrogen bromide or bromine
FUJITSU LTD49 citations94
US4798650AJan 17, 1989
Method of dry etching aluminum
FUJITSU LTD40 citations92
US6043004AMar 28, 2000
Ashing method
FUJITSU LTD23 citations91